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MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA

Author: Albert Karl Henning; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Publisher: Bellingham, Wash. : SPIE, ©2005.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 5717.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.

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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Albert Karl Henning; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
ISBN: 0819456918 9780819456915
OCLC Number: 59132132
Description: xli, 242 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 5717.
Responsibility: Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA).

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