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MEMS/MOEMS technologies and applications II : 10-12 November 2004, Beijing, China

Author: Zhichun MaGuofan JinXu yuan ChenSociety of Photo-optical Instrumentation Engineers.Zhongguo guang xue xue hui.All authors
Publisher: Bellingham, Wash. : SPIE, ©2004.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 5641.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.

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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: (OCoLC)57435501
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Zhichun Ma; Guofan Jin; Xu yuan Chen; Society of Photo-optical Instrumentation Engineers.; Zhongguo guang xue xue hui.; Australian Optical Society.; Guo jia zi ran ke xue ji jin wei yuan hui (China); SPIE Digital Library.
ISBN: 0819455962 9780819455963
OCLC Number: 57518891
Reproduction Notes: Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Description: xi, 364 pages : illustrations ; 28 cm.
Contents: Electromagnetic MEMs eight-channel variable optical attenuator array / Xuhan Dai [and others] --
Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applications / Vicknesh Shanmugan [and others] --
Structure design of Si-based M-Z interference acceleration seismic geophone / Bo Wu [and others] --
Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications / Mithilesh A. Shah, Vicknesh Shanmugan, and Akkipeddi Ramam --
The application of laser micromachining technology in fiber optic sensing / Desheng Jiang [and others] --
The study on the compound x-ray refractive lens using LIGA technique / Jingqiu Liang [and others] --
Silicon scanning mirror with 54.74° slanted reflective surface for fluorescence scanning system / Kook-Nyung Lee [and others] --
BioMEMS for high-throughput handling and microinjection of embryos / Ralph W. Bernstein, Matthew Scott, and Olav Solgaard --
Torsion-mirror optical actuators with compound driving structures / Wengang Wu [and others] --
A high-g overload-protected accelerometer with a novel microstructure / Weiping Chen [and others] --
Mechanism and experiment study on photothermally excited bilayer silicon microcantilever resonators / Shaojun Zhang and Yueming Liu --
Polymer-derived ceramics-based fuel atomizers / Zhichun Ma [and others] --
Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems / Yun-Ho Jang [and others] --
Microfluidic dye laser integration in a lab-on-a-chip device / Qingli Kou [and others] --
Origin mechanism of residual stresses in porous silicon film / Zhenkun Lei [and others] --
Optical properties study of silicon oxynitride films deposited by RF magnetron sputtering / Yong Zhu [and others] --
Lumped model for the comb-finger capacitance and electrostatic force / Xuyuan Chen, Zhichun Ma, and Geir U. Jensen --
Simulation and comparison of movable membrane design for MEMS Fabry-Perot tunable filter / Wei Jiang, Fang Cui, and Yu-nan Sun --
The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay / Huinan Hong [and others] --
3D align overlay verification using glass wafers / Eric M.J. Smeets [and others] --
Analysis of the structures and characteristics for an InP-based micromechanical tunable filter / Bin Chen [and others] --
Study on application and analysis of a microaccelerometer with magnetorheological fluids / Zhonghua Lin [and others] --
Development of microfabrication technology for MEMS/MOEMS applications / Zheng Cui --
Two new types of microneedle array fabricated by x-ray lithography / Yigui Li and Susumu Sugiyama --
Fabrication of anisotropic structures with large aspect ratio and minimal roughness by using black silicon method / Yue Zhao [and others] --
Electrochemical etching of deep-macropore array on p-type silicon wafers / Yanjun Gao [and others] --
The microfabrication using powder materials with excimer laser / Jimin Chen [and others] --
Fabrication of grating waveguides based on nano-imprint lithography and silicon-mould replication techniques / Yueming Liu, Masayoshi Esashi, and Weijian Tian --
Microfabrication assisted by laser-trapped microparticle tools / Jian Bai [and others] --
Fabrication of PDMS (poly-dimethyl siloxane) molding and 3D structure by two-photon absorption induced by an ultrafast laser / Shin Wook Yi [and others] --
Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm / Ming Li [and others] --
A novel system to measure MEMS motion / Changlin Leng [and others] --
Theoretical calculation of light-induced forces and torques on complex microrotors / Yuxiang Liu, Anding Zhu, and Wenhao Huang --
Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology / Feng Cui [and others] --
Parallel valveless micropump with two flexible diaphragms / Yufeng Su [and others] --
Theoretical analysis of grating light valve / J. Zhang [and others] --
Microfluid oscillator based on thermocapillarity / Teng-chao Huang [and others] --
Preparation of multimode fiber grating by microprocessing modification and their temperature-sensing properties / Sijin Xin [and others] --
Optimization of torque on an optically driven micromotor by manipulation of the index of refraction / Frank M. Wing III [and others] --
Fabrication and application of a novel freestanding stencil bi-material cantilever structure / Weibing Wang [and others] --
X-ray lithography mask fabricated by excimer laser process / Yigui Li and Susumu Sugiyama --
Study on optical parts of MOEMS optical switch with low insertion loss / Anjie Ming [and others] --
Extraction of exposure modeling parameters of thick resist / Chi Liu [and others] --
Silicon microhole array prepared by ICP / Qingduo Duanmu [and others] --
Progress in large-range and nanoscale micromotion stage / Benyong Chen, Junru Wang, and Yong Lei --
A model for the microfabrication with selective laser sintering metal powders / Canfu Yue, Jimin Chen, and Tiechuan Zuo.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 5641.
Other Titles: MOEMS technologies and applications
MEMS/MOEMS technologies and applications 2
MEMS/MOEMS technologies and applications two
Responsibility: Zhichun Ma, Guofan Jin, Xuyuan Chen, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society [and others] ; supporting organizations, National Natural Science Foundation of China [and others].

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