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Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA

Author: Kenneth W Tobin; Fred Lakhani; Society of Photo-optical Instrumentation Engineers.; SPIE Digital Library.
Publisher: Bellingham, Wash. : SPIE, ©2001.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 4275.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: (DLC) 2001275710
(OCoLC)47779380
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Kenneth W Tobin; Fred Lakhani; Society of Photo-optical Instrumentation Engineers.; SPIE Digital Library.
ISBN: 0819439533 9780819439536
OCLC Number: 53836401
Reproduction Notes: Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Description: vii, 156 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4275.
Responsibility: Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

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