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Micro and Nano Fabrication : Tools and Processes

Author: Hans H Gatzen; Jürg Leuthold; Volker Saile
Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2015.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are  Read more...

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Additional Physical Format: Erscheint auch als:
Gatzen, Hans-Heinrich, 1943.
Micro and nano fabrication
Online-Ausgabe
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Hans H Gatzen; Jürg Leuthold; Volker Saile
ISBN: 9783662443941 3662443945 9783662443958 3662443953
OCLC Number: 902846289
Description: 1 online resource (XXVI, 519 Seiten 357 Illustrationen, 54 Illustrationen in color).
Contents: Introduction-MEMS, a Historical Perspective.- Vacuum Technology.- Deposition Technologies.- Etching Technologies.- Doping and Surface Modification.- Lithography.- LIGA.- Nanofabrication by Self-Assembly.- Enabling Technologies I - Wafer Planarization and Bonding.- Enabling Technologies II - Contamination Control.- Device Fabrication - An Example.
Responsibility: by Hans H. Gatzen, Volker Saile, Jürg Leuthold.

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"The book is clearly written and easy to read. Thevarious topics are balanced and well organized. ... The numerous figures andschematics are the most useful tools of the book. ... It is useful to Read more...

 
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