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Micro electro mechanical system design

Author: James J Allen
Publisher: Boca Raton : Taylor & Francis, 2005.
Series: Mechanical engineering (Taylor & Francis), 192.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Database:WorldCat
Summary:

Offers information helpful to develop a successful micro electro mechanical system (MEMS) design. This work explains the design process by illustrating the range of issues involved, how they are  Read more...

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Genre/Form: Electronic books
Additional Physical Format: Print version:
Allen, James J.
Micro electro mechanical system design.
Boca Raton : Taylor & Francis, 2005
(DLC) 2005041771
(OCoLC)57692765
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: James J Allen
ISBN: 0824758242 9780824758240 1420027751 9781420027754
OCLC Number: 309876067
Description: 1 online resource (465 pages) : illustrations.
Contents: Table of INTRODUCTION Historical Perspective The Development of MEMS Technology MEMS: Present and Future MEMS Challenges The Aim of This Book Questions References FABRICATION PROCESSES Materials Starting Material - Substrates Physical Vapor Deposition (PVD) Chemical Vapor Deposition (CVD) Etching Processes Patterning Wafer Bonding Annealing Chemical Mechanical Polishing (CMP) Material Doping Summary Questions References MEMS TECHNOLOGIES Bulk Micromachining LIGA Sacrificial Surface Micromachining Integration of Electronics and MEMS Technology (IMEMS) Technology Characterization Alternative MEMS Materials Summary Questions References SCALING ISSUES FOR MEMS Scaling of Physical Systems Computational Issues of Scale Fabrication Issues of Scale Material Issues Newly Relevant Physical Phenomena Summary Questions References DESIGN REALIZATION TOOLS FOR MEMS Layout SUMMiT(TM) Technology Layout Design Rules Standard Components MEMS Visualization MEMS Analysis Summary Questions References ELECTROMECHANICS Structural Mechanics Damping Electrical System Dynamics Questions References MODELING AND DESIGN Design Synthesis Modeling Lagrange's Equations Numerical Modeling Design Uncertainty Problems References MEMS SENSORS AND ACTUATORS MEMS Actuators MEMS Sensing Questions References PACKAGING Packaging Process Steps Packaging Case Studies Summary Questions References RELIABILITY Reliability Theory and Terminology Essential Aspects of Probability and Statistics for Reliability Reliability Models MEMS Failure Mechanisms Measurement Techniques for MEMS Operational, Reliability and Failure Analysis Testing MEMS Reliability and Design MEMS Reliability Case Studies Summary Questions References APPENDIX Glossary Prefixes Micro-MKS Conversions Physical Constants Material Properties Stiffness Coefficients of Frequently Used MEMS Flexures Common MEMS Cross-Section Properties Design Synthesis Software and Files
Series Title: Mechanical engineering (Taylor & Francis), 192.
Responsibility: James J. Allen.
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Primary Entity

<http://www.worldcat.org/oclc/309876067> # Micro electro mechanical system design
    a schema:CreativeWork, schema:MediaObject, schema:Book ;
   library:oclcnum "309876067" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/5869626#Place/boca_raton> ; # Boca Raton
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/flu> ;
   schema:about <http://dewey.info/class/621/e22/> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/5869626#Topic/microelectromechanical_systems_design_and_construction> ; # Microelectromechanical systems--Design and construction
   schema:about <http://experiment.worldcat.org/entity/work/data/5869626#Topic/technology_&_engineering_mechanical> ; # TECHNOLOGY & ENGINEERING--Mechanical
   schema:about <http://id.worldcat.org/fast/910453> ; # Engineering design
   schema:about <http://id.worldcat.org/fast/1019747> ; # Microelectromechanical systems--Design and construction
   schema:bookFormat schema:EBook ;
   schema:creator <http://viaf.org/viaf/36516312> ; # James J. Allen
   schema:datePublished "2005" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/5869626> ;
   schema:genre "Electronic books"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/5869626#Series/mechanical_engineering_taylor_&_francis> ; # Mechanical engineering (Taylor & Francis) ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/5869626#Series/mechanical_engineering> ; # Mechanical engineering ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/57692765> ;
   schema:name "Micro electro mechanical system design"@en ;
   schema:productID "309876067" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/309876067#PublicationEvent/boca_raton_taylor_&_francis_2005> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/5869626#Agent/taylor_&_francis> ; # Taylor & Francis
   schema:url <http://site.ebrary.com/id/10143690> ;
   schema:url <http://www.myilibrary.com?id=60378&ref=toc> ;
   schema:url <http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=154045> ;
   schema:url <http://www.crcnetbase.com/isbn/9781420027754> ;
   schema:url <http://www.crcnetbase.com/isbn/9780824758240> ;
   schema:url <http://www.myilibrary.com?id=60378> ;
   schema:workExample <http://worldcat.org/isbn/9781420027754> ;
   schema:workExample <http://worldcat.org/isbn/9780824758240> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/309876067> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/5869626#Agent/taylor_&_francis> # Taylor & Francis
    a bgn:Agent ;
   schema:name "Taylor & Francis" ;
    .

<http://experiment.worldcat.org/entity/work/data/5869626#Series/mechanical_engineering> # Mechanical engineering ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/309876067> ; # Micro electro mechanical system design
   schema:name "Mechanical engineering ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/5869626#Series/mechanical_engineering_taylor_&_francis> # Mechanical engineering (Taylor & Francis) ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/309876067> ; # Micro electro mechanical system design
   schema:name "Mechanical engineering (Taylor & Francis) ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/5869626#Topic/microelectromechanical_systems_design_and_construction> # Microelectromechanical systems--Design and construction
    a schema:Intangible ;
   schema:hasPart <http://id.loc.gov/authorities/subjects/sh97007351> ;
   schema:name "Microelectromechanical systems--Design and construction"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/5869626#Topic/technology_&_engineering_mechanical> # TECHNOLOGY & ENGINEERING--Mechanical
    a schema:Intangible ;
   schema:name "TECHNOLOGY & ENGINEERING--Mechanical"@en ;
    .

<http://id.worldcat.org/fast/1019747> # Microelectromechanical systems--Design and construction
    a schema:Intangible ;
   schema:name "Microelectromechanical systems--Design and construction"@en ;
    .

<http://id.worldcat.org/fast/910453> # Engineering design
    a schema:Intangible ;
   schema:name "Engineering design"@en ;
    .

<http://viaf.org/viaf/36516312> # James J. Allen
    a schema:Person ;
   schema:familyName "Allen" ;
   schema:givenName "James J." ;
   schema:name "James J. Allen" ;
    .

<http://worldcat.org/isbn/9780824758240>
    a schema:ProductModel ;
   schema:isbn "0824758242" ;
   schema:isbn "9780824758240" ;
    .

<http://worldcat.org/isbn/9781420027754>
    a schema:ProductModel ;
   schema:isbn "1420027751" ;
   schema:isbn "9781420027754" ;
    .

<http://www.worldcat.org/oclc/57692765>
    a schema:CreativeWork ;
   rdfs:label "Micro electro mechanical system design." ;
   schema:description "Print version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/309876067> ; # Micro electro mechanical system design
    .


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