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Micro electro mechanical system design

Author: James J Allen
Publisher: Boca Raton : Taylor & Francis, 2005.
Series: Mechanical engineering (Taylor & Francis), 192.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:

Offers information helpful to develop a successful micro electro mechanical system (MEMS) design. This work explains the design process by illustrating the range of issues involved, how they are  Read more...

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Genre/Form: Electronic books
Additional Physical Format: Print version:
Allen, James J.
Micro electro mechanical system design.
Boca Raton : Taylor & Francis, 2005
(DLC) 2005041771
(OCoLC)57692765
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: James J Allen
ISBN: 0824758242 9780824758240 1420027751 9781420027754
OCLC Number: 309876067
Description: 1 online resource (465 pages) : illustrations.
Contents: Table of INTRODUCTIONHistorical PerspectiveThe Development of MEMS TechnologyMEMS: Present and FutureMEMS Challenges The Aim of This BookQuestionsReferencesFABRICATION PROCESSESMaterials Starting Material - SubstratesPhysical Vapor Deposition (PVD)Chemical Vapor Deposition (CVD)Etching ProcessesPatterningWafer BondingAnnealingChemical Mechanical Polishing (CMP)Material DopingSummaryQuestionsReferencesMEMS TECHNOLOGIES Bulk MicromachiningLIGASacrificial Surface MicromachiningIntegration of Electronics and MEMS Technology (IMEMS) Technology CharacterizationAlternative MEMS MaterialsSummaryQuestionsReferencesSCALING ISSUES FOR MEMSScaling of Physical SystemsComputational Issues of ScaleFabrication Issues of ScaleMaterial Issues Newly Relevant Physical PhenomenaSummaryQuestions ReferencesDESIGN REALIZATION TOOLS FOR MEMSLayoutSUMMiT (TM) Technology LayoutDesign RulesStandard ComponentsMEMS VisualizationMEMS AnalysisSummaryQuestionsReferencesELECTROMECHANICS Structural MechanicsDampingElectrical System DynamicsQuestionsReferencesMODELING AND DESIGN Design Synthesis ModelingLagrange's EquationsNumerical ModelingDesign UncertaintyProblemsReferencesMEMS SENSORS AND ACTUATORS MEMS ActuatorsMEMS SensingQuestionsReferencesPACKAGING Packaging Process StepsPackaging Case StudiesSummaryQuestionsReferencesRELIABILITY Reliability Theory and TerminologyEssential Aspects of Probability and Statistics for ReliabilityReliability ModelsMEMS Failure MechanismsMeasurement Techniques for MEMS Operational, Reliability and Failure Analysis TestingMEMS Reliability and DesignMEMS Reliability Case StudiesSummaryQuestionsReferencesAPPENDIXGlossaryPrefixesMicro-MKS ConversionsPhysical ConstantsMaterial PropertiesStiffness Coefficients of Frequently Used MEMS FlexuresCommon MEMS Cross-Section PropertiesDesign Synthesis Software and Files
Series Title: Mechanical engineering (Taylor & Francis), 192.
Responsibility: James J. Allen.
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