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Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings : IEEE, Fort Lauderdale, Florida, February 7-10, 1993

Author: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.
Publisher: [New York] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center, ©1993.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
IEEE Workshop on Micro Electro Mechanical Systems (1993 : Fort Lauderdale, Fla.).
Micro electro mechanical systems.
[New York] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center, ©1993
(DLC) 92056273
(OCoLC)27919417
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.
ISBN: 078030957X 9780780309579 0780309588 9780780309586 0780309596 9780780309593
OCLC Number: 47883006
Notes: "1993 IEEE Workshop on Micro Electro Mechanical Systems"--Page iii.
"IEEE catalog number 93CH3265-6."
Description: 1 online resource (xvii, 294 pages) : illustrations
Other Titles: IEEE Micro Electro Mechanical Systems Workshop
MEMS '93
Micro Electro Mechanical Systems, 1993, MEMS '93, proceedings "An investigation of micro structures, sensors, actuators, machines and systems", IEEE
Responsibility: sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.

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Primary Entity

<http://www.worldcat.org/oclc/47883006> # Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings : IEEE, Fort Lauderdale, Florida, February 7-10, 1993
    a schema:CreativeWork, schema:MediaObject, schema:Book ;
    library:oclcnum "47883006" ;
    library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/3857240447#Place/piscataway_nj> ; # Piscataway, NJ
    library:placeOfPublication <http://dbpedia.org/resource/New_York_City> ; # New York
    library:placeOfPublication <http://id.loc.gov/vocabulary/countries/nyu> ;
    schema:about <http://dewey.info/class/620.4/e20/> ;
    schema:about <http://experiment.worldcat.org/entity/work/data/3857240447#Topic/detectors> ; # Detectors
    schema:about <http://experiment.worldcat.org/entity/work/data/3857240447#Topic/electromechanical_devices> ; # Electromechanical devices
    schema:about <http://id.worldcat.org/fast/796346> ; # Actuators
    schema:about <http://id.worldcat.org/fast/891594> ; # Detectors
    schema:about <http://id.worldcat.org/fast/1019757> ; # Microelectronics
    schema:about <http://id.worldcat.org/fast/906623> ; # Electromechanical devices
    schema:about <http://experiment.worldcat.org/entity/work/data/3857240447#Topic/microelectronics> ; # Microelectronics
    schema:about <http://experiment.worldcat.org/entity/work/data/3857240447#Topic/actuators> ; # Actuators
    schema:alternateName "MEMS '93" ;
    schema:alternateName "IEEE Micro Electro Mechanical Systems Workshop" ;
    schema:alternateName "Micro Electro Mechanical Systems, 1993, MEMS '93, proceedings "An investigation of micro structures, sensors, actuators, machines and systems", IEEE" ;
    schema:bookFormat schema:EBook ;
    schema:contributor <http://viaf.org/viaf/148787480> ; # American Society of Mechanical Engineers. Dynamic Systems and Control Division.
    schema:contributor <http://experiment.worldcat.org/entity/work/data/3857240447#Organization/ieee_robotics_and_automation_society> ; # IEEE Robotics and Automation Society.
    schema:copyrightYear "1993" ;
    schema:creator <http://experiment.worldcat.org/entity/work/data/3857240447#Meeting/ieee_workshop_on_micro_electro_mechanical_systems_1993_fort_lauderdale_fla> ; # IEEE Workshop on Micro Electro Mechanical Systems (1993 : Fort Lauderdale, Fla.)
    schema:datePublished "1993" ;
    schema:exampleOfWork <http://worldcat.org/entity/work/id/3857240447> ;
    schema:genre "Conference papers and proceedings"@en ;
    schema:genre "Conference publication"@en ;
    schema:inLanguage "en" ;
    schema:isSimilarTo <http://www.worldcat.org/oclc/27919417> ;
    schema:name "Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings : IEEE, Fort Lauderdale, Florida, February 7-10, 1993"@en ;
    schema:productID "47883006" ;
    schema:publication <http://www.worldcat.org/title/-/oclc/47883006#PublicationEvent/new_york_institute_of_electrical_and_electronics_engineers_piscataway_nj_ieee_service_center_1993> ;
    schema:publisher <http://experiment.worldcat.org/entity/work/data/3857240447#Agent/institute_of_electrical_and_electronics_engineers> ; # Institute of Electrical and Electronics Engineers
    schema:publisher <http://experiment.worldcat.org/entity/work/data/3857240447#Agent/ieee_service_center> ; # IEEE Service Center
    schema:url <http://ieeexplore.ieee.org/servlet/opac?punumber=1052> ;
    schema:workExample <http://worldcat.org/isbn/9780780309593> ;
    schema:workExample <http://worldcat.org/isbn/9780780309579> ;
    schema:workExample <http://worldcat.org/isbn/9780780309586> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/47883006> ;
    .


Related Entities

<http://dbpedia.org/resource/New_York_City> # New York
    a schema:Place ;
    schema:name "New York" ;
    .

<http://experiment.worldcat.org/entity/work/data/3857240447#Agent/ieee_service_center> # IEEE Service Center
    a bgn:Agent ;
    schema:name "IEEE Service Center" ;
    .

<http://experiment.worldcat.org/entity/work/data/3857240447#Agent/institute_of_electrical_and_electronics_engineers> # Institute of Electrical and Electronics Engineers
    a bgn:Agent ;
    schema:name "Institute of Electrical and Electronics Engineers" ;
    .

<http://experiment.worldcat.org/entity/work/data/3857240447#Meeting/ieee_workshop_on_micro_electro_mechanical_systems_1993_fort_lauderdale_fla> # IEEE Workshop on Micro Electro Mechanical Systems (1993 : Fort Lauderdale, Fla.)
    a bgn:Meeting, schema:Event ;
    schema:location <http://experiment.worldcat.org/entity/work/data/3857240447#Place/fort_lauderdale_fla> ; # Fort Lauderdale, Fla.)
    schema:name "IEEE Workshop on Micro Electro Mechanical Systems (1993 : Fort Lauderdale, Fla.)" ;
    .

<http://experiment.worldcat.org/entity/work/data/3857240447#Organization/ieee_robotics_and_automation_society> # IEEE Robotics and Automation Society.
    a schema:Organization ;
    schema:name "IEEE Robotics and Automation Society." ;
    .

<http://experiment.worldcat.org/entity/work/data/3857240447#Place/fort_lauderdale_fla> # Fort Lauderdale, Fla.)
    a schema:Place ;
    schema:name "Fort Lauderdale, Fla.)" ;
    .

<http://experiment.worldcat.org/entity/work/data/3857240447#Place/piscataway_nj> # Piscataway, NJ
    a schema:Place ;
    schema:name "Piscataway, NJ" ;
    .

<http://id.worldcat.org/fast/1019757> # Microelectronics
    a schema:Intangible ;
    schema:name "Microelectronics"@en ;
    .

<http://id.worldcat.org/fast/796346> # Actuators
    a schema:Intangible ;
    schema:name "Actuators"@en ;
    .

<http://id.worldcat.org/fast/891594> # Detectors
    a schema:Intangible ;
    schema:name "Detectors"@en ;
    .

<http://id.worldcat.org/fast/906623> # Electromechanical devices
    a schema:Intangible ;
    schema:name "Electromechanical devices"@en ;
    .

<http://viaf.org/viaf/148787480> # American Society of Mechanical Engineers. Dynamic Systems and Control Division.
    a schema:Organization ;
    schema:name "American Society of Mechanical Engineers. Dynamic Systems and Control Division." ;
    .

<http://worldcat.org/isbn/9780780309579>
    a schema:ProductModel ;
    schema:isbn "078030957X" ;
    schema:isbn "9780780309579" ;
    .

<http://worldcat.org/isbn/9780780309586>
    a schema:ProductModel ;
    schema:isbn "0780309588" ;
    schema:isbn "9780780309586" ;
    .

<http://worldcat.org/isbn/9780780309593>
    a schema:ProductModel ;
    schema:isbn "0780309596" ;
    schema:isbn "9780780309593" ;
    .

<http://www.worldcat.org/oclc/27919417>
    a schema:CreativeWork ;
    rdfs:label "Micro electro mechanical systems." ;
    schema:description "Print version:" ;
    schema:isSimilarTo <http://www.worldcat.org/oclc/47883006> ; # Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings : IEEE, Fort Lauderdale, Florida, February 7-10, 1993
    .

<http://www.worldcat.org/title/-/oclc/47883006>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
    schema:about <http://www.worldcat.org/oclc/47883006> ; # Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings : IEEE, Fort Lauderdale, Florida, February 7-10, 1993
    schema:dateModified "2017-11-16" ;
    void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


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