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Microchip fabrication : a practical guide to semiconductor processing

Author: Peter Van Zant
Publisher: New York : McGraw-Hill, ©2004.
Series: McGraw-Hill professional engineering.; McGraw Hill professional.
Edition/Format:   eBook : Document : English : 5th edView all editions and formats
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Van Zant, Peter.
Microchip fabrication.
New York : McGraw-Hill, ©2004
(DLC) 2004040287
(OCoLC)54857930
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Peter Van Zant
ISBN: 9781601192691 160119269X 9780071450218 0071450211 9780071501392 0071501398
OCLC Number: 144615758
Description: 1 online resource (xiii, 642 pages) : illustrations.
Contents: The Semiconductor Industry International Technology Roadmap for Semiconductors Semiconductor Materials and Process Chemicals Manufacturing Wafers Overview of Wafer Fabrication 300mm wafer diameter processing Contamination Control Process Yields Nanotechnology Processes Oxidation Basic Patterning -- Surface Preparation to Exposure Basic Patterning -- Developing to Final Inspection Advanced Photolithography Processes Doping Deposition of Dielectrics and Semiconductor Layers Metalization: Wiring the Chip Composites Process and Device Evaluation The Business of Water Fabrication Green Processing Semiconductor Devices and Integrated Circuit Formation Nanotechnology Devices Integrated Circuit Types Packaging GLOSSARY
Series Title: McGraw-Hill professional engineering.; McGraw Hill professional.
Responsibility: Peter Van Zant.

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Used for training, teaching, and vocational-technical programs, this book covers various stages of semiconductor processing, from raw material preparation to packaging and testing and traditional  Read more...

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