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Microelectronic device technology III : 22-23 September 1999, Santa Clara, California

Author: David Burnett; Toshiaki Tsuchiya; Society of Photo-optical Instrumentation Engineers.; Electrochemical Society.
Publisher: Bellingham, Wash., USA : SPIE, ©1999.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 3881.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Summary:

These conference proceedings consist of 35 papers on relevant issues and topics within the field of microelectric device technology.

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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: David Burnett; Toshiaki Tsuchiya; Society of Photo-optical Instrumentation Engineers.; Electrochemical Society.
ISBN: 0819434787 9780819434784
OCLC Number: 42777356
Description: ix, 304 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 3881.
Other Titles: Microelectronic device technology 3
Microelectronic device technology three
Responsibility: David Burnett, Toshiaki Tsuchiya, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society [and others].

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