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Microelectronics fabrication equipment, 1966-67,

Author: G W A Dummer; J Mackenzie Robertson
Publisher: Oxford, New York, Pergamon Press [1966]
Series: Pergamon electronic data series.
Edition/Format:   Print book : EnglishView all editions and formats
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Additional Physical Format: Online version:
Dummer, G.W.A. (Geoffrey William Arnold).
Microelectronics fabrication equipment, 1966-67.
Oxford, New York, Pergamon Press [1966]
(OCoLC)603187763
Document Type: Book
All Authors / Contributors: G W A Dummer; J Mackenzie Robertson
OCLC Number: 1438960
Description: xi, 531 pages illustrations 29 cm.
Series Title: Pergamon electronic data series.
Responsibility: edited by G.W.A. Dummer and J. Mackenzie Robertson.

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