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Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas

Author: Fusen E Chen; S P Murarka; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1994.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 2335.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Microelectronics technology and process integration.
Bellingham, Wash., USA : SPIE, ©1994
(OCoLC)624400939
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Fusen E Chen; S P Murarka; Society of Photo-optical Instrumentation Engineers.
ISBN: 0819416681 9780819416681
OCLC Number: 31210232
Description: ix, 290 pages : illustrations ; 28 cm.
Contents: Plasma etching and planarization --
Metallization technologies --
Metallization technologies and laser-induced processes --
Dielectric and device modeling.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 2335.
Responsibility: Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

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