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Microengineering aerospace systems

Author: Henry Helvajian
Publisher: El Segundo, CA : Aerospace Press ; Reston, VA : American Institute of Aeronautics and Astronautics, 1999.
Edition/Format:   eBook : Document : EnglishView all editions and formats
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Microengineering aerospace systems.
El Segundo, CA : Aerospace Press ; Reston, VA : American Institute of Aeronautics and Astronautics, 1999
(DLC) 99018130
(OCoLC)40723737
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Henry Helvajian
ISBN: 9781601192172 1601192177 9781884989032 1884989039
OCLC Number: 123497455
Description: 1 online resource (xiii, 707 pages) : illustrations
Responsibility: Henry Helvajian, editor.

Abstract:

This is a textbook tutorial encompassing MEMS (micro-electromechanical systems), nanoelectronics, packaging, processing and materials characterization for developing miniaturized smart instruments  Read more...

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