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Microengineering aerospace systems

Author: Henry Helvajian
Publisher: El Segundo, CA : Aerospace Press ; Reston, VA : American Institute of Aeronautics and Astronautics, 1999.
Edition/Format:   Print book : EnglishView all editions and formats
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Genre/Form: Aufsatzsammlung
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Henry Helvajian
ISBN: 1884989039 9781884989032
OCLC Number: 40723737
Description: xiii, 707 pages : illustrations ; 24 cm
Responsibility: Henry Helvajian, editor.

Abstract:

This is a textbook tutorial encompassing MEMS (micro-electromechanical systems), nanoelectronics, packaging, processing and materials characterization for developing miniaturized smart instruments  Read more...

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