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Microengineering, MEMS, and interfacing : a practical guide

Author: Danny Banks
Publisher: Boca Raton, FL : CRC/Taylor & Francis, 2006.
Series: Mechanical engineering (Taylor & Francis), 199.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Presents a general overview of micromachining techniques. This guide outlines techniques for micromachining materials, including silicon, metals, and polymers. It illustrates how to combine these  Read more...

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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Danny Banks
ISBN: 0824723058 9780824723057
OCLC Number: 64511340
Description: 326 pages : illustrations ; 24 cm.
Contents: Computer generated contents: Chapt. 1. Photolithography --
chapt. 2. Silicon micromachining --
chapt. 3. Nonsilicon processes --
chapt. 4. Mask design --
chapt. 5. Microsensors --
chapt. 6. Microactuators --
chapt. 7. Micro total analysis systems --
chapt. 8. Integrated optics --
chapt. 9. Assembly and packaging --
chapt. 10. Nanotechnology --
chapt. 11. Amplifiers and filtering --
chapt. 12. Computer interfacing --
chapt. 13. Output drivers.
Series Title: Mechanical engineering (Taylor & Francis), 199.
Responsibility: Danny Banks.
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Primary Entity

<http://www.worldcat.org/oclc/64511340> # Microengineering, MEMS, and interfacing : a practical guide
    a schema:CreativeWork, schema:Book ;
   library:oclcnum "64511340" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/flu> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/315479798#Place/boca_raton_fl> ; # Boca Raton, FL
   schema:about <http://experiment.worldcat.org/entity/work/data/315479798#Topic/mems> ; # MEMS
   schema:about <http://experiment.worldcat.org/entity/work/data/315479798#Topic/micromachines> ; # Micromachines
   schema:about <http://dewey.info/class/621/e22/> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/315479798#Topic/mikromechanik> ; # Mikromechanik
   schema:about <http://id.worldcat.org/fast/1019745> ; # Microelectromechanical systems
   schema:bookFormat bgn:PrintBook ;
   schema:creator <http://viaf.org/viaf/11024568> ; # Danny Banks
   schema:datePublished "2006" ;
   schema:description "Computer generated contents: Chapt. 1. Photolithography -- chapt. 2. Silicon micromachining -- chapt. 3. Nonsilicon processes -- chapt. 4. Mask design -- chapt. 5. Microsensors -- chapt. 6. Microactuators -- chapt. 7. Micro total analysis systems -- chapt. 8. Integrated optics -- chapt. 9. Assembly and packaging -- chapt. 10. Nanotechnology -- chapt. 11. Amplifiers and filtering -- chapt. 12. Computer interfacing -- chapt. 13. Output drivers."@en ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/315479798> ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/315479798#Series/mechanical_engineering_taylor_&_francis> ; # Mechanical engineering (Taylor & Francis) ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/315479798#Series/mechanical_engineering> ; # Mechanical engineering ;
   schema:name "Microengineering, MEMS, and interfacing : a practical guide"@en ;
   schema:productID "64511340" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/64511340#PublicationEvent/boca_raton_fl_crc_taylor_&_francis_2006> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/315479798#Agent/crc_taylor_&_francis> ; # CRC/Taylor & Francis
   schema:url <http://www.crcnetbase.com/isbn/9781420015416> ;
   schema:workExample <http://worldcat.org/isbn/9780824723057> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/64511340> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/315479798#Agent/crc_taylor_&_francis> # CRC/Taylor & Francis
    a bgn:Agent ;
   schema:name "CRC/Taylor & Francis" ;
    .

<http://experiment.worldcat.org/entity/work/data/315479798#Series/mechanical_engineering> # Mechanical engineering ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/64511340> ; # Microengineering, MEMS, and interfacing : a practical guide
   schema:name "Mechanical engineering ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/315479798#Series/mechanical_engineering_taylor_&_francis> # Mechanical engineering (Taylor & Francis) ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/64511340> ; # Microengineering, MEMS, and interfacing : a practical guide
   schema:name "Mechanical engineering (Taylor & Francis) ;" ;
    .

<http://id.worldcat.org/fast/1019745> # Microelectromechanical systems
    a schema:Intangible ;
   schema:name "Microelectromechanical systems"@en ;
    .

<http://viaf.org/viaf/11024568> # Danny Banks
    a schema:Person ;
   schema:familyName "Banks" ;
   schema:givenName "Danny" ;
   schema:name "Danny Banks" ;
    .

<http://worldcat.org/isbn/9780824723057>
    a schema:ProductModel ;
   schema:isbn "0824723058" ;
   schema:isbn "9780824723057" ;
    .


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