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Microengineering, MEMS, and interfacing : a practical guide

Author: Danny Banks
Publisher: Boca Raton, FL : CRC/Taylor & Francis, 2006.
Series: Mechanical engineering (Taylor & Francis), 199.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:

Presents a general overview of micromachining techniques. This guide outlines techniques for micromachining materials, including silicon, metals, and polymers. It illustrates how to combine these  Read more...

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Genre/Form: Electronic books
Additional Physical Format: Print version:
Banks, Danny.
Microengineering, MEMS, and interfacing.
Boca Raton, FL : CRC/Taylor & Francis, 2006
(DLC) 2006042635
(OCoLC)64511340
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Danny Banks
ISBN: 0824723058 9780824723057 1420015419 9781420015416
OCLC Number: 72522744
Description: 1 online resource (326 pages) : illustrations.
Contents: MICROMACHINING; . Introduction; Photolithography; . Introduction; . UV Photolithography; . X-Ray Lithography; . Direct-Write (E-Beam) Lithography; . Low-Cost Photolithography; . Photolithography-Key Points; . References; Silicon Micromachining; . Introduction; . Silicon; . Crystal Growth; . Doping; . Wafer Specifications; . Thin Films; . Structures in Silicon; . Wafer Dicing; . References; Nonsilicon Processes; . Introduction; . Chemical-Mechanical Polishing; . LIGA and Electroplating; . Photochemical Machining; . Laser Machining; . Polymer Microforming; . Electrical Discharge Machining; . Photostructurable Glasses; . Precision Engineering; . Other Processes; . References; Mask Design; . Introduction; . Minimum Feature Size; . Layout Software; . Design; . Design Rules; . Getting the Masks Produced; . Generating Gerber Files; . Mask Design-Key Points; ; MICROSYSTEMS; . Introduction; Microsensors; . Introduction; . Thermal Sensors; . Radiation Sensors; . Magnetic Sensors; . Chemical Sensors and Biosensors; . Microelectrodes for Neurophysiology; . Mechanical Sensors; Microactuators; . Introduction; . Electrostatic Actuators; . Magnetic Actuators; . Piezoelectric Actuators; . Thermal Actuators; . Hydraulic Actuators; . Multilayer Bonded Devices; . Microstimulators; Micro Total Analysis Systems; . Introduction; . Basic Chemistry; . Applications of Microengineered Devices in Chemistry and Biochemistry; . Micro Total Analysis Systems; . DNA Chips; . The Polymerase Chain Reaction (PCR); . Conducting Polymers and Hydrogels; . References; Integrated Optics; . Introduction; . Waveguides; . Integrated Optics Components; . Fiber Coupling; . Other Applications; Assembly and Packaging; . Introduction; . Assembly; . Passivation; . Prepackage Testing; . Packaging; . Wire Bonding; . Materials for Prototype Assembly and Packaging; Nanotechnology; . Introduction; . The Scanning Electron Microscope; . Scanning Probe Microscopy; . Nanoelectromechanical Systems; . Langmuir-Blodgett Films; . Bionanotechnology; . Molecular Nanotechnology; . References; ; INTERFACING; . Introduction; Amplifiers and Filtering; . Introduction; . Op-Amp; . Instrumentation Amplifiers; . Wheatstone Bridge; . Filtering; . References; Computer Interfacing; . Introduction; . Driving Analog Devices from Digital Sources; . Analog-to-Digital Conversion; . Analog-to-Digital Converters; . Converter Summary; . References; Output Drivers; . Introduction; . Controlling Currents and Voltages with Op-Amps; . Transistors; . Relays; . BJT Output Boost for Op-Amps; .
Series Title: Mechanical engineering (Taylor & Francis), 199.
Responsibility: Danny Banks.

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