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Microfabrication and nanomanufacturing

Author: Mark J Jackson
Publisher: Boca Raton, FL : CRC/Taylor & Francis, 2006.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Microfabrication and nanomanufacturing.
Boca Raton, F.L. : CRC/Taylor & Francis, 2006
(DLC) 2005049275
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Mark J Jackson
ISBN: 9781420028270 1420028278
OCLC Number: 276798518
Description: 1 online resource (401 pages) : illustrations
Contents: Front Cover; Preface; The Editor; Contributors; Contents; 1. Micro- and Nanofabrication; 2. Microfabrication Using X-Ray Lithography; 3. Etching, Machining, and Molding High-Aspect Ratio Microstructures; 4. The Size Effect in Micromachining; 5. Mechanical Micromachining; 6. Precision Micro- and Nanogrinding; 7. CVD Diamond Technology for Microtools, NEMS, and MEMS Applications; 8. Laser-Based Micro and Nanofabrication; 9. Pulsed Water Drop Micromachining; 10. Diamond Nanogrinding; 11. Nanometric Machining: Theory, Methods, and Implementation. 12. Nanocrystalline Diamond: Deposition Routes and Applications13. Commercialization Issues of Micro-Nano Technology; 14. The Future of Micro- and Nanomanufacturing; Index.
Responsibility: edited by Mark J. Jackson.

Abstract:

Honing on the increased activity in nanotechnology driven by economic necessity, this book examines the technology of fabrication and manufacturing of engineering materials at the micro- and  Read more...

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"The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of Read more...

 
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Primary Entity

<http://www.worldcat.org/oclc/276798518> # Microfabrication and nanomanufacturing
    a schema:CreativeWork, schema:MediaObject, schema:Book ;
   library:oclcnum "276798518" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/flu> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/3901573168#Place/boca_raton_fl> ; # Boca Raton, FL
   schema:about <http://experiment.worldcat.org/entity/work/data/3901573168#Topic/technology_&_engineering_reference> ; # TECHNOLOGY & ENGINEERING--Reference
   schema:about <http://experiment.worldcat.org/entity/work/data/3901573168#Topic/microelectromechanical_systems_design_and_construction> ; # Microelectromechanical systems--Design and construction
   schema:about <http://dewey.info/class/620.5/e22/> ;
   schema:about <http://id.worldcat.org/fast/975545> ; # Integrated circuits--Design and construction
   schema:about <http://id.worldcat.org/fast/1019757> ; # Microelectronics
   schema:about <http://id.worldcat.org/fast/1019747> ; # Microelectromechanical systems--Design and construction
   schema:about <http://id.loc.gov/authorities/subjects/sh85067118> ; # Integrated circuits--Design and construction
   schema:about <http://experiment.worldcat.org/entity/work/data/3901573168#Topic/technology_&_engineering_engineering_general> ; # TECHNOLOGY & ENGINEERING--Engineering (General)
   schema:bookFormat schema:EBook ;
   schema:contributor <http://viaf.org/viaf/16634415> ; # Mark J. Jackson
   schema:datePublished "2006" ;
   schema:description "Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk."@en ;
   schema:description "Front Cover; Preface; The Editor; Contributors; Contents; 1. Micro- and Nanofabrication; 2. Microfabrication Using X-Ray Lithography; 3. Etching, Machining, and Molding High-Aspect Ratio Microstructures; 4. The Size Effect in Micromachining; 5. Mechanical Micromachining; 6. Precision Micro- and Nanogrinding; 7. CVD Diamond Technology for Microtools, NEMS, and MEMS Applications; 8. Laser-Based Micro and Nanofabrication; 9. Pulsed Water Drop Micromachining; 10. Diamond Nanogrinding; 11. Nanometric Machining: Theory, Methods, and Implementation."@en ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/3901573168> ;
   schema:genre "Electronic books"@en ;
   schema:inLanguage "en" ;
   schema:isSimilarTo <http://worldcat.org/entity/work/data/3901573168#CreativeWork/microfabrication_and_nanomanufacturing> ;
   schema:name "Microfabrication and nanomanufacturing"@en ;
   schema:productID "276798518" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/276798518#PublicationEvent/boca_raton_fl_crc_taylor_&_francis_2006> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/3901573168#Agent/crc_taylor_&_francis> ; # CRC/Taylor & Francis
   schema:url <http://www.crcnetbase.com/isbn/9780824724313> ;
   schema:url <https://login.proxy.bib.uottawa.ca/login?url=http://marc.crcnetbase.com/isbn/9781420028270> ;
   schema:url <http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=154010> ;
   schema:url <http://www.crcnetbase.com/isbn/9781420028270> ;
   schema:url <https://www.taylorfrancis.com/books/9781420028270> ;
   schema:url <http://marc.crcnetbase.com/isbn/9781420028270> ;
   schema:url <https://login.proxy.bib.uottawa.ca/login?url=http://www.taylorfrancis.com/books/9781420028270> ;
   schema:url <http://www.taylorfrancis.com/books/9781420028270> ;
   schema:url <http://site.ebrary.com/id/10150694> ;
   schema:url <http://www.myilibrary.com?id=65265&ref=toc> ;
   schema:url <http://www.myilibrary.com?id=65265> ;
   schema:workExample <http://worldcat.org/isbn/9781420028270> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/276798518> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/3901573168#Agent/crc_taylor_&_francis> # CRC/Taylor & Francis
    a bgn:Agent ;
   schema:name "CRC/Taylor & Francis" ;
    .

<http://experiment.worldcat.org/entity/work/data/3901573168#Topic/microelectromechanical_systems_design_and_construction> # Microelectromechanical systems--Design and construction
    a schema:Intangible ;
   schema:hasPart <http://id.loc.gov/authorities/subjects/sh97007351> ;
   schema:name "Microelectromechanical systems--Design and construction"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/3901573168#Topic/technology_&_engineering_engineering_general> # TECHNOLOGY & ENGINEERING--Engineering (General)
    a schema:Intangible ;
   schema:name "TECHNOLOGY & ENGINEERING--Engineering (General)"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/3901573168#Topic/technology_&_engineering_reference> # TECHNOLOGY & ENGINEERING--Reference
    a schema:Intangible ;
   schema:name "TECHNOLOGY & ENGINEERING--Reference"@en ;
    .

<http://id.loc.gov/authorities/subjects/sh85067118> # Integrated circuits--Design and construction
    a schema:Intangible ;
   schema:name "Integrated circuits--Design and construction"@en ;
    .

<http://id.worldcat.org/fast/1019747> # Microelectromechanical systems--Design and construction
    a schema:Intangible ;
   schema:name "Microelectromechanical systems--Design and construction"@en ;
    .

<http://id.worldcat.org/fast/1019757> # Microelectronics
    a schema:Intangible ;
   schema:name "Microelectronics"@en ;
    .

<http://id.worldcat.org/fast/975545> # Integrated circuits--Design and construction
    a schema:Intangible ;
   schema:name "Integrated circuits--Design and construction"@en ;
    .

<http://marc.crcnetbase.com/isbn/9781420028270>
   rdfs:comment "Distributed by publisher. Purchase or institutional license may be required for access." ;
    .

<http://viaf.org/viaf/16634415> # Mark J. Jackson
    a schema:Person ;
   schema:familyName "Jackson" ;
   schema:givenName "Mark J." ;
   schema:name "Mark J. Jackson" ;
    .

<http://worldcat.org/entity/work/data/3901573168#CreativeWork/microfabrication_and_nanomanufacturing>
    a schema:CreativeWork ;
   rdfs:label "Microfabrication and nanomanufacturing." ;
   schema:description "Print version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/276798518> ; # Microfabrication and nanomanufacturing
    .

<http://worldcat.org/isbn/9781420028270>
    a schema:ProductModel ;
   schema:isbn "1420028278" ;
   schema:isbn "9781420028270" ;
    .

<http://www.taylorfrancis.com/books/9781420028270>
   rdfs:comment "from CRCnetBASE" ;
   rdfs:comment "(Unlimited Concurrent Users)" ;
    .

<https://login.proxy.bib.uottawa.ca/login?url=http://marc.crcnetbase.com/isbn/9781420028270>
   rdfs:comment "ENGnetBASE (Restricted to University of Ottawa)" ;
    .

<https://www.taylorfrancis.com/books/9781420028270>
   rdfs:comment "from Taylor & Francis" ;
    .


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