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Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore

Author: Chris A Mack; Xiaocong Yuan; Society of Photo-optical Instrumentation Engineers.; Nanyang Technological University.; Institute of Physics, Singapore.
Publisher: Bellingham, Wash., USA : SPIE, ©2000.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 4226.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Singapur (2000)
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Chris A Mack; Xiaocong Yuan; Society of Photo-optical Instrumentation Engineers.; Nanyang Technological University.; Institute of Physics, Singapore.
ISBN: 0819438987 9780819438980
OCLC Number: 46338316
Description: xv, 194 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4226.
Responsibility: Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) [and others].

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