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Microlithography : process technology for IC fabrication

Author: David J Elliott
Publisher: New York : McGraw-Hill, ©1986.
Edition/Format:   Print book : EnglishView all editions and formats
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Additional Physical Format: Online version:
Elliott, David J.
Microlithography.
New York : McGraw-Hill, ©1986
(OCoLC)569568674
Online version:
Elliott, David J.
Microlithography.
New York : McGraw-Hill, ©1986
(OCoLC)608166891
Document Type: Book
All Authors / Contributors: David J Elliott
ISBN: 0070193045 9780070193048
OCLC Number: 12418734
Description: xix, 378 pages : illustrations ; 24 cm
Responsibility: David J. Elliott.

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