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  E-mail Message: I thought you might be interested in this item at http://www.worldcat.org/oclc/71581976 Title: Microlithography : science and technology Author: Kazuaki Suzuki; Bruce W Smith Publisher: Boca Raton : CRC Press, ©2007. ISBN/ISSN: 9780824790240 0824790243 OCLC:71581976

  
  

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Microlithography : science and technology

Author:	Kazuaki Suzuki; Bruce W Smith
Publisher:	Boca Raton : CRC Press, ©2007.
Series:	Optical science and engineering (Boca Raton, Fla.), 126.
Edition/Format:	Book : English : 2nd edView all editions and formats
Summary:	Describes both elementary and advanced aspects of sub micron micro lithography. This text covers optics, excimer laser light sources, and alignment techniques and analysis, as well as resist chemistry, multilayer lithography, plasma and reactive ion etching, and metrology. It discusses electron beam, x-ray and proximal probe techniques.  Read more...
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