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Microlithography world.

Author: Society of Photo-optical Instrumentation Engineers.
Publisher: Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE
Edition/Format:   eJournal/eMagazine : Document : Periodical : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Periodicals
Additional Physical Format: Print version:
Microlithography world
(DLC) 93659127
(OCoLC)28982886
Material Type: Document, Periodical, Internet resource
Document Type: Internet Resource, Computer File, Journal / Magazine / Newspaper
All Authors / Contributors: Society of Photo-optical Instrumentation Engineers.
OCLC Number: 60626225
Notes: Published: Tulsa, OK, Oct., Nov., Dec. 1993-
Details: Mode of access: World Wide Web.

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Primary Entity

<http://www.worldcat.org/oclc/60626225> # Microlithography world.
    a schema:Periodical, schema:MediaObject, schema:CreativeWork ;
   library:oclcnum "60626225" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/31440818#Place/port_washington_n_y> ; # Port Washington, N.Y.
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/oku> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/31440818#Topic/semiconductors_design_and_construction> ; # Semiconductors--Design and construction
   schema:about <http://id.worldcat.org/fast/1011095> ; # Masks (Electronics)
   schema:about <http://id.worldcat.org/fast/1112213> ; # Semiconductors--Design and construction
   schema:about <http://id.loc.gov/authorities/subjects/sh85084858> ; # Microlithography
   schema:about <http://dewey.info/class/621.381531/e20/> ;
   schema:about <http://id.worldcat.org/fast/1019883> ; # Microlithography
   schema:contributor <http://viaf.org/viaf/127619765> ; # Society of Photo-optical Instrumentation Engineers.
   schema:datePublished "1992/9999" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/31440818> ;
   schema:genre "Periodicals"@en ;
   schema:inLanguage "en" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/28982886> ;
   schema:name "Microlithography world."@en ;
   schema:productID "60626225" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/60626225#PublicationEvent/port_washington_n_y_penn_well_publication_published_in_cooperation_with_spie> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/31440818#Agent/penn_well_publication_published_in_cooperation_with_spie> ; # Penn Well Publication, published in cooperation with SPIE
   schema:url <https://www.westlaw.com/search/default.wl?db=MLTHWORLD&Action=search&RS=ITK3.0&VR=1.0> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/60626225> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/31440818#Agent/penn_well_publication_published_in_cooperation_with_spie> # Penn Well Publication, published in cooperation with SPIE
    a bgn:Agent ;
   schema:name "Penn Well Publication, published in cooperation with SPIE" ;
    .

<http://experiment.worldcat.org/entity/work/data/31440818#Place/port_washington_n_y> # Port Washington, N.Y.
    a schema:Place ;
   schema:name "Port Washington, N.Y." ;
    .

<http://id.loc.gov/authorities/subjects/sh85084858> # Microlithography
    a schema:Intangible ;
   schema:name "Microlithography"@en ;
    .

<http://id.worldcat.org/fast/1011095> # Masks (Electronics)
    a schema:Intangible ;
   schema:name "Masks (Electronics)"@en ;
    .

<http://id.worldcat.org/fast/1019883> # Microlithography
    a schema:Intangible ;
   schema:name "Microlithography"@en ;
    .

<http://id.worldcat.org/fast/1112213> # Semiconductors--Design and construction
    a schema:Intangible ;
   schema:name "Semiconductors--Design and construction"@en ;
    .

<http://viaf.org/viaf/127619765> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
   schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://www.worldcat.org/oclc/28982886>
    a schema:CreativeWork ;
   rdfs:label "Microlithography world" ;
   schema:description "Print version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/60626225> ; # Microlithography world.
    .


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