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Microlithography world

Author: Society of Photo-optical Instrumentation Engineers.
Publisher: Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE
Edition/Format:   eJournal/eMagazine : Document : Periodical : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Periodicals
Additional Physical Format: Print version
Microlithography world
(DLC) 93659127
(OCoLC)28982886
Material Type: Document, Periodical, Internet resource
Document Type: Internet Resource, Computer File, Journal / Magazine / Newspaper
All Authors / Contributors: Society of Photo-optical Instrumentation Engineers.
OCLC Number: 60626225
Notes: Published: Tulsa, OK, Oct., Nov., Dec. 1993-
Details: Mode of access: World Wide Web.

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