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Micromachined transducers sourcebook

Author: Gregory T A Kovacs
Publisher: Boston : WCB/McGraw-Hill, [1998] ©1998
Series: McGraw-Hill series in electrical and computer engineering., Electronics and VLSI circuits.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:
Designed for a graduate-level course in micromachined devices, or as an introduction to the field for practicing engineers, this book presents an overview of the field, beginning with micromachining approaches and including all major categories of transduction. It examines the fabrication of individual devices through the study of design issues and provides examples of key transducers, or structures, for comparison  Read more...
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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Gregory T A Kovacs
ISBN: 0072907223 9780072907223
OCLC Number: 38218159
Description: xx, 911, 3 pages : illustrations ; 25 cm.
Contents: Introduction and overview --
Micromachining techniques --
Mechanical transducers --
Optical transducers --
Ionizing radiation transducers --
Thermal transducers --
Magnetic & electromagnetic transducers --
Chemical and biological transducers --
Microfluidic devices.
Series Title: McGraw-Hill series in electrical and computer engineering., Electronics and VLSI circuits.
Responsibility: Gregory T.A. Kovacs, Stanford University.
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Abstract:

Provides an overview of the field, beginning with micromachining approaches and then covering the various major categories of transduction. This book takes a practical approach to the subject, and  Read more...

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