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Micromachining and microfabrication : 28-30 November 2000, Singapore

Author: Kevin ChauAsh M ParameswaranFrancis E H TaySociety of Photo-optical Instrumentation Engineers.Nanyang Technological University.; et al; All authors
Publisher: Bellingham, Wash., USA : SPIE, ©2000.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 4230.
Edition/Format:   Book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference proceedings
Congresses
Additional Physical Format: Online version:
Micromachining and microfabrication.
Bellingham, Wash., USA : SPIE, c2000
(OCoLC)606567459
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Kevin Chau; Ash M Parameswaran; Francis E H Tay; Society of Photo-optical Instrumentation Engineers.; Nanyang Technological University.; Institute of Physics, Singapore.; et al
ISBN: 0819439029 9780819439024
OCLC Number: 46339464
Description: vii, 248 p. : ill. ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4230.
Responsibility: Kevin Chau, Ash M. Parameswaran, Francis E.H. Tay, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.].

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