skip to content
Micromachining and microfabrication : 28-30 November 2000, Singapore Preview this item
ClosePreview this item
Checking...

Micromachining and microfabrication : 28-30 November 2000, Singapore

Author: Kevin ChauAsh M ParameswaranFrancis E H TaySociety of Photo-optical Instrumentation Engineers.Nanyang Technological University.All authors
Publisher: Bellingham, Wash., USA : SPIE, ©2000.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 4230.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

 

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Genre/Form: Conference papers and proceedings
Congresses
Congresos
Additional Physical Format: Online version:
Micromachining and microfabrication.
Bellingham, Wash., USA : SPIE, ©2000
(OCoLC)606567459
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Kevin Chau; Ash M Parameswaran; Francis E H Tay; Society of Photo-optical Instrumentation Engineers.; Nanyang Technological University.; Institute of Physics, Singapore.
ISBN: 0819439029 9780819439024
OCLC Number: 46339464
Description: vii, 248 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4230.
Responsibility: Kevin Chau, Ash M. Parameswaran, Francis E.H. Tay, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) [and others].

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


Primary Entity

<http://www.worldcat.org/oclc/46339464> # Micromachining and microfabrication : 28-30 November 2000, Singapore
    a schema:CreativeWork, schema:Book ;
   library:oclcnum "46339464" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/365965710#Place/bellingham_wash_usa> ; # Bellingham, Wash., USA
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
   schema:about <http://id.worldcat.org/fast/1019888> ; # Microelectromechanical systems
   schema:about <http://experiment.worldcat.org/entity/work/data/365965710#Topic/microfabrication> ; # Microfabrication
   schema:about <http://id.worldcat.org/fast/1019807> ; # Microfabricación
   schema:about <http://experiment.worldcat.org/entity/work/data/365965710#Topic/microelectromechanical_systems> ; # Microelectromechanical systems
   schema:about <http://experiment.worldcat.org/entity/work/data/365965710#Topic/micromachining> ; # Micromachining
   schema:about <http://id.worldcat.org/fast/1019745> ; # Sistemas microelectromecánicos
   schema:about <http://dewey.info/class/671.35/e21/> ;
   schema:bookFormat bgn:PrintBook ;
   schema:contributor <http://viaf.org/viaf/14422515> ; # Francis E. H. Tay
   schema:contributor <http://experiment.worldcat.org/entity/work/data/365965710#Person/parameswaran_ash_m> ; # Ash M. Parameswaran
   schema:contributor <http://viaf.org/viaf/140405330> ; # Institute of Physics, Singapore.
   schema:contributor <http://viaf.org/viaf/143212124> ; # Nanyang Technological University.
   schema:contributor <http://viaf.org/viaf/56504824> ; # Kevin Chau
   schema:contributor <http://experiment.worldcat.org/entity/work/data/365965710#Organization/society_of_photo_optical_instrumentation_engineers> ; # Society of Photo-optical Instrumentation Engineers.
   schema:copyrightYear "2000" ;
   schema:datePublished "2000" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/365965710> ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:genre "Conference publication"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/365965710#Series/proceedings_of_spie_the_international_society_for_optical_engineering> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
   schema:isPartOf <http://worldcat.org/issn/0277-786X> ; # SPIE proceedings series.
   schema:isSimilarTo <http://www.worldcat.org/oclc/606567459> ;
   schema:name "Micromachining and microfabrication : 28-30 November 2000, Singapore"@en ;
   schema:productID "46339464" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/46339464#PublicationEvent/bellingham_wash_usa_spie_2000> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/365965710#Agent/spie> ; # SPIE
   schema:workExample <http://worldcat.org/isbn/9780819439024> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/46339464> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/365965710#Organization/society_of_photo_optical_instrumentation_engineers> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
   schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://experiment.worldcat.org/entity/work/data/365965710#Person/parameswaran_ash_m> # Ash M. Parameswaran
    a schema:Person ;
   schema:familyName "Parameswaran" ;
   schema:givenName "Ash M." ;
   schema:name "Ash M. Parameswaran" ;
    .

<http://experiment.worldcat.org/entity/work/data/365965710#Place/bellingham_wash_usa> # Bellingham, Wash., USA
    a schema:Place ;
   schema:name "Bellingham, Wash., USA" ;
    .

<http://experiment.worldcat.org/entity/work/data/365965710#Series/proceedings_of_spie_the_international_society_for_optical_engineering> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/46339464> ; # Micromachining and microfabrication : 28-30 November 2000, Singapore
   schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://id.worldcat.org/fast/1019745> # Sistemas microelectromecánicos
    a schema:Intangible ;
   schema:name "Sistemas microelectromecánicos"@en ;
    .

<http://id.worldcat.org/fast/1019807> # Microfabricación
    a schema:Intangible ;
   schema:name "Microfabricación"@en ;
    .

<http://id.worldcat.org/fast/1019888> # Microelectromechanical systems
    a schema:Intangible ;
   schema:name "Microelectromechanical systems"@en ;
    .

<http://viaf.org/viaf/140405330> # Institute of Physics, Singapore.
    a schema:Organization ;
   schema:name "Institute of Physics, Singapore." ;
    .

<http://viaf.org/viaf/143212124> # Nanyang Technological University.
    a schema:Organization ;
   schema:name "Nanyang Technological University." ;
    .

<http://viaf.org/viaf/14422515> # Francis E. H. Tay
    a schema:Person ;
   schema:familyName "Tay" ;
   schema:givenName "Francis E. H." ;
   schema:name "Francis E. H. Tay" ;
    .

<http://viaf.org/viaf/56504824> # Kevin Chau
    a schema:Person ;
   schema:familyName "Chau" ;
   schema:givenName "Kevin" ;
   schema:name "Kevin Chau" ;
    .

<http://worldcat.org/isbn/9780819439024>
    a schema:ProductModel ;
   schema:isbn "0819439029" ;
   schema:isbn "9780819439024" ;
    .

<http://worldcat.org/issn/0277-786X> # SPIE proceedings series.
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/46339464> ; # Micromachining and microfabrication : 28-30 November 2000, Singapore
   schema:issn "0277-786X" ;
   schema:name "SPIE proceedings series." ;
    .

<http://www.worldcat.org/oclc/606567459>
    a schema:CreativeWork ;
   rdfs:label "Micromachining and microfabrication." ;
   schema:description "Online version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/46339464> ; # Micromachining and microfabrication : 28-30 November 2000, Singapore
    .


Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.