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Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California

Author: James H Smith; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Publisher: Bellingham, Wash. : SPIE, ©1998.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 3511.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Summary:

An analysis of micromachining and microfabrication process technology. It covers: direct write; new processes; antistiction and assembly; new technologies; and more.

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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
Micromachining and microfabrication process technology IV.
Bellingham, Wash. : SPIE, ©1998
(DLC) 99200342
(OCoLC)39930212
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: James H Smith; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
ISBN: 0819429708 9780819429704
OCLC Number: 53834335
Description: 1 online resource (xi, 402 pages) : illustrations.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 3511.
Other Titles: SPIE digital library.
Responsibility: James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others].

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