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Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

Author: James H Smith; Jean-Michel Karam; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Publisher: Bellingham, Wash. : SPIE, ©1999.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 3874.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
Micromachining and microfabrication process technology V.
Bellingham, Wash. : SPIE, ©1999
(DLC) 00266008
(OCoLC)42869812
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: James H Smith; Jean-Michel Karam; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
ISBN: 081943471X 9780819434715
OCLC Number: 53835775
Description: 1 online resource (x, 434 pages) : illustrations.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 3874.
Other Titles: SPIE digital library.
Responsibility: James H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology [and others].

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