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Microsystems dynamics

Author: Vytautas Ostasevicius; Rolanas Dauksevicius
Publisher: New York : Springer, 2010.
Series: International series on intelligent systems, control and automation--science and engineering, v. 44.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
In recent years, microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Ostasevicius, Vytautas.
Microsystems dynamics.
New York : Springer, 2010
(DLC) 2010937993
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Vytautas Ostasevicius; Rolanas Dauksevicius
ISBN: 9789048197019 9048197015
OCLC Number: 694146564
Description: 1 online resource (viii, 214 pages) : illustrations.
Contents: Microsystems Dynamics; Preface; Contents; Chapter 1: Introduction; Chapter 2: Modeling and Simulation of Contact-Type Electrostatic Microactuator; Chapter 3: Dynamics of Elastic Vibro-Impact Microsystems; Chapter 4: Theoretical Analysis of a Micromotor; Chapter 5: Technological Realization of MEMS Structures and Their Experimental Investigation.
Series Title: International series on intelligent systems, control and automation--science and engineering, v. 44.
Responsibility: Vytautas Ostasevicius, Rolanas Dauksevicius.

Abstract:

In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. This book provides coverage of the state-of-the-art of this rapidly  Read more...

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