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Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California

Author: M Edward Motamedi; Rolf Göring; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Publisher: Bellingham, Wash., USA : SPIE, ©1999.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 3878.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Summary:

These scientific papers discuss miniaturized systems with micro-optics and microelectromechanical systems (MEMS) from a range of perspectives.

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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Miniaturized systems with micro-optics and MEMS.
Bellingham, Wash., USA : SPIE, ©1999
(OCoLC)606487208
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: M Edward Motamedi; Rolf Göring; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
ISBN: 0819434752 9780819434753
OCLC Number: 42908566
Notes: Earlier conferences titled: Miniaturized systems with micro-optics and micromechanics.
Description: viii, 426 pages : illustrations ; 28 cm.
Contents: Plenary papers --
MOEM scanners --
Micromirror devices --
MOEMs switches/shutters --
MOEMs for sensing applications --
MOEM devices --
MOEMs for display application --
MOEMs integration --
Poster session.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 3878.
Other Titles: Miniaturized systems with micro-optics and micromechanics.
Responsibility: M.E. Motamedi, Rolf Goering, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology [and others].

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