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Miniaturized systems with micro-optics and micromechanics : 30-31 January 1996, San Jose, California

Autore: M Edward Motamedi; Society of Photo-optical Instrumentation Engineers.; United States. Advanced Research Projects Agency.
Editore: Bellingham, Wash. : SPIE, ©1996.
Serie: Proceedings of SPIE--the International Society for Optical Engineering, v. 2687.
Edizione/Formato:   book_printbook : Conference publication : EnglishVedi tutte le edizioni e i formati
Banca dati:WorldCat
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Genere/forma: Conference papers and proceedings
Tipo materiale: Conference publication
Tipo documento: Book
Tutti gli autori / Collaboratori: M Edward Motamedi; Society of Photo-optical Instrumentation Engineers.; United States. Advanced Research Projects Agency.
ISBN: 0819420611 9780819420619
Numero OCLC: 34642069
Descrizione: vii, 168 p. : ill. ; 28 cm.
Contenuti: Micromachined optical devices: Recent achievements on MOEM systems at Micromachine Center (MMC) / R. Ohta. Micromirror arrays for active optical aberration control / S.C. Gustafson, T.A. Tuthill, E.A. Watson. Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding / U. Kohler, A.E. Guber, W. Bier, M. Heckele, Th. Schaller. Miniaturized optical switches based on piezoelectrically driven microprism arrays / R. Goring, S. Glockner, F. Bohrisch --
Micro-optic/actuators and scanners: Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process / V.M. Bright, J.H. Comtois, D.E. Sene, J.R. Reid, S.C. Gustafson and E.A. Watson. Magnetically actuated MEMS scanning mirror / R.A. Miller, G.W. Burr, Y.-C. Tai, D. Psaltis. Actuation of polysilicon surface-micromachined mirrors / N.C. Tien, M.-H. Kiang, M.J. Daneman, O. Solgaard, K.Y. Lau, R.S. Muller. Analysis of optical beam steering using phased micromirror arrays / E.A. Watson, A.R. Miller --
Micro-optic integration: FPAs and thin film binary optic microlens integration / M.E. Motamedi, W.E. Tennant, R. Melendes, N.S. Gluck, S. Park, J.M. Arias, J. Bajaj, J.G. Pasko, W.V. McLevige, M. Zandian, R. Hall, K.G. Steckbauer, P.D. Richardson, D.E. Cooper. Optical network of silicon micromachined sensors / M.L. Wilson, D.W. Burns, J.D. Zook. Microjet printing of anamorphic microlens arrays / W.R. Cox, T. Chen, D.W. Ussery, D.J. Hayes, R.F. Hoenigman, D.L. MacFarlane, F. Rabinovich. Design and fabrication issues in the development of monolithic micro-optical systems / C.M. Egert, S. Rajic --
Micro-optic components I: Micro-size ball lenses for micro-optics : theory and experiment / L. Yang, K.W. Chang, G.R. Trott, R.P. Ratowsky, R.J. Deri, J.S. Kallman. Monolithically integrated refractive microlens standing perpendicular to the substrate / C.R. King, L.-Y. Lin, M.C. Wu. Planar gradient-index cylindrical microlenses : flexible components for laser diode applications / R. Goring, T. Poßner, P. Schrieber --
Micro-optic components II: Novel method for making parabolic grating / B. Chen, L. Guo, J. Tang, P. Xu, M. Zhou. Fabrication of microlens arrays by reactive ion milling / H.O. Sankur, R.L. Hall, M.E. Motamedi, W.J. Gunning, W.E. Tennant. Aspherization of cylindrical lenses by laser irradiation / V.P. Veiko, A.T. Shakola, E.B. Jakovlev, E.A. Shahno.
Titolo della serie: Proceedings of SPIE--the International Society for Optical Engineering, v. 2687.
Responsabilità: M. Edward Motamedi, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, ARPA, Advanced Research Projects Agency.

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