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Miniaturized systems with micro-optics and micromechanics : 30-31 January 1996, San Jose, California

著者: M Edward Motamedi; Society of Photo-optical Instrumentation Engineers.; United States. Advanced Research Projects Agency.
出版商: Bellingham, Wash. : SPIE, ©1996.
丛书: Proceedings of SPIE--the International Society for Optical Engineering, v. 2687.
版本/格式:   图书 : 会议刊物 : 英语查看所有的版本和格式
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类型/形式: Conference proceedings
Congresses
材料类型: 会议刊物
文件类型:
所有的著者/提供者: M Edward Motamedi; Society of Photo-optical Instrumentation Engineers.; United States. Advanced Research Projects Agency.
ISBN: 0819420611 9780819420619
OCLC号码: 34642069
描述: vii, 168 pages : illustrations ; 28 cm.
内容: Recent achievements on MOEM systems at Micromachine Center (MMC) / R. Ohta --
Micromirror arrays for active optical aberration control / S.C. Gustafson, T.A. Tuthill and E.A. Watson --
Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding / U. Kohler, A.E. Guber, W. Bier, M. Heckele and Th. Schaller --
Miniaturized optical switches based on piezoelectrically driven microprism arrays / R. Goring, S. Glockner and F. Bohrisch --
Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process / V.M. Bright, J.H. Comtois, D.E. Sene, J.R. Reid, S.C. Gustafson and E.A. Watson --
Magnetically actuated MEMS scanning mirror / R.A. Miller, G.W. Burr, Y.-C. Tai and D. Psaltis --
Actuation of polysilicon surface-micromachined mirrors / N.C. Tien, M.-H. Kiang, M.J. Daneman, O. Solgaard, K.Y. Lau and R.S. Muller.
丛书名: Proceedings of SPIE--the International Society for Optical Engineering, v. 2687.
责任: M. Edward Motamedi, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, ARPA, Advanced Research Projects Agency.

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