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Miniaturized systems with micro-optics and micromechanics : 30-31 January 1996, San Jose, California

Author: M Edward Motamedi; Society of Photo-optical Instrumentation Engineers.; United States. Advanced Research Projects Agency.
Publisher: Bellingham, Wash. : SPIE, ©1996.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 2687.
Edition/Format:   Book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: M Edward Motamedi; Society of Photo-optical Instrumentation Engineers.; United States. Advanced Research Projects Agency.
ISBN: 0819420611 9780819420619
OCLC Number: 34642069
Description: vii, 168 p. : ill. ; 28 cm.
Contents: Recent achievements on MOEM systems at Micromachine Center (MMC) / R. Ohta --
Micromirror arrays for active optical aberration control / S. C. Gustafson, T. A. Tuthill and E. A. Watson --
Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding / U. Kohler, A. E. Guber, W. Bier, M. Heckele and Th. Schaller --
Miniaturized optical switches based on piezoelectrically driven microprism arrays / R. Goring, S. Glockner and F. Bohrisch --
Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process / V. M. Bright, J. H. Comtois, D. E. Sene, J. R. Reid, S. C. Gustafson and E. A. Watson --
Magnetically actuated MEMS scanning mirror / R. A. Miller, G. W. Burr, Y.-C. Tai and D. Psaltis --
Actuation of polysilicon surface-micromachined mirrors / N. C. Tien, M.-H. Kiang, M. J. Daneman, O. Solgaard, K. Y. Lau and R. S. Muller
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 2687.
Responsibility: M. Edward Motamedi, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, ARPA, Advanced Research Projects Agency.

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