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Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California

Author: M Edward Motamedi; Larry J Hornbeck; Kristofer S J Pister; Society of Photo-optical Instrumentation Engineers.; United States. Defense Advanced Research Projects Agency.
Publisher: Bellingham, Wash., USA : SPIE, ©1997.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 3008.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: M Edward Motamedi; Larry J Hornbeck; Kristofer S J Pister; Society of Photo-optical Instrumentation Engineers.; United States. Defense Advanced Research Projects Agency.
ISBN: 0819424196 9780819424198
OCLC Number: 36896297
Description: viii, 382 pages : illustrations ; 28 cm.
Contents: Plenary paper: MOEM systems in europe / P. Salomon, O.M. Parriaux --
MOEM devices --
Beam steering and micro-optical scanners --
Micro-optics integration --
Optical processing and control --
MOEM processes --
MEM actuator materials.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 3008.
Responsibility: M. Edward Motamedi, Larry J. Hornbeck, Kristofer S.J. Pister, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, DARPA--Defense Advanced Research Projects Agency.

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