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Model of plasma immersion ion implantation for voltage pulses with finite rise- and fall-times

Author: R A Stewart; M A Lieberman
Publisher: Berkeley : Electronics Research Laboratory, College of Engineering, University of California, [1991]
Series: Memorandum (University of California, Berkeley, Electronics Research Laboratory), no. UCB/ERL M91/14.
Edition/Format:   Book : English
Database:WorldCat
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Document Type: Book
All Authors / Contributors: R A Stewart; M A Lieberman
OCLC Number: 44005991
Notes: "21 February 1991 (revised 12 June 1991)."
Description: 20 p., 9 p. of plates
Series Title: Memorandum (University of California, Berkeley, Electronics Research Laboratory), no. UCB/ERL M91/14.
Responsibility: by R.A. Stewart and M.A. Lieberman.

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