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Modeling MEMS and NEMS

Author: John A Pelesko; David H Bernstein
Publisher: Boca Raton, FL : Chapman & Hall/CRC, 2003.
Edition/Format:   eBook : Document : EnglishView all editions and formats

Designing small structures necessitates an understanding of various device behaviors. The way to gain that understanding is to build, analyze, and interpret the proper mathematical models. Through  Read more...


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Genre/Form: Electronic books
Additional Physical Format: Print version:
Pelesko, John A.
Modeling MEMS and NEMS.
Boca Raton, FL : Chapman & Hall/CRC, 2003
(DLC) 2002031599
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: John A Pelesko; David H Bernstein
ISBN: 1584883065 9781584883067 1420035290 9781420035292
OCLC Number: 181190386
Description: 1 online resource (xxiii, 357 pages) : illustrations
Contents: INTRODUCTION MEMS and NEMS A Capsule History of MEMS and NEMS Dimensional Analysis and Scaling Exercises A REFRESHER ON CONTINUUM MECHANICS Introduction The Continuum Hypothesis Heat Conduction Elasticity Linear Thermoelasticity Fluid Dynamics Electromagnetism Numerical Methods for Continuum Mechanics SMALL IS DIFFERENT The Backyard Scaling Systems Exercises THERMALLY DRIVEN SYSTEMS Introduction Thermally Driven Devices From PDE to ODE: Lumped Models Joule Heating of a Cylinder Analysis of Thermal Data Storage Exercises MODELING ELASTIC STRUCTURES Introduction Examples of Elastic Structures in MEMS/NEMS The Mass on a Spring Membranes Beams Plates The Capacitive Pressure Sensor Exercises MODELING COUPLED THERMAL-ELASTIC SYSTEMS Introduction Devices and Phenomena in Thermal-Elastic Systems Modeling Thermopneumatic Systems The Thermoelastic Rod Revisited Modeling Thermoelastic V-Beam Actuators Modeling Thermal Bimorph Actuators Modeling Bimetallic Thermal Actuators Exercises MODELING ELECTROSTATIC-ELASTIC SYSTEMS Introduction Devices Using Electrostatic Actuation The Mass-Spring Model Modeling General Electrostatic-Elastic Systems Electrostatic-Elastic Systems - Membrane Theory Electrostatic-Elastic Systems - Beam and Plate Theory Analysis of Capacitive Control Schemes Exercises MODELING MAGNETICALLY ACTUATED SYSTEMS Introduction Magnetically Driven Devices Mass-Spring Models A Simple Membrane Micropump Model A Small-Aspect Ratio Model Exercises MICROFLUIDICS Introduction Microfluidic Devices More Fluidic Scaling Modeling Squeeze Film Damping Exercises BEYOND CONTINUUM THEORY Introduction Limits of Contiuum Mechanics Devices and Systems Beyond Continuum Theory Exercises REFERENCES APPENDICES Mathematical Results Physical Constants INDEX Each chapter also contains Related Reading and Notes sections.
Responsibility: John A. Pelesko and David H. Bernstein.
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"Researchers in MEMS and NEMS are likely to find much of interest [in this book], and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent. Read more...

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