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Modeling MEMS and NEMS

Author: John A Pelesko; David H Bernstein
Publisher: Boca Raton, FL : Chapman & Hall/CRC, 2003.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:

Designing small structures necessitates an understanding of various device behaviors. The way to gain that understanding is to build, analyze, and interpret the proper mathematical models. Through  Read more...

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Genre/Form: Electronic books
Additional Physical Format: Print version:
Pelesko, John A.
Modeling MEMS and NEMS.
Boca Raton, FL : Chapman & Hall/CRC, 2003
(DLC) 2002031599
(OCoLC)50560812
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: John A Pelesko; David H Bernstein
ISBN: 1584883065 9781584883067 1420035290 9781420035292
OCLC Number: 181190386
Description: 1 online resource (xxiii, 357 pages) : illustrations
Contents: INTRODUCTION; MEMS and NEMS; A Capsule History of MEMS and NEMS; Dimensional Analysis and Scaling; Exercises; A REFRESHER ON CONTINUUM MECHANICS; Introduction; The Continuum Hypothesis; Heat Conduction; Elasticity; Linear Thermoelasticity; Fluid Dynamics; Electromagnetism; Numerical Methods for Continuum Mechanics; SMALL IS DIFFERENT; The Backyard; Scaling; Systems; Exercises; THERMALLY DRIVEN SYSTEMS; Introduction; Thermally Driven Devices; From PDE to ODE: Lumped Models; Joule Heating of a Cylinder; Analysis of Thermal Data Storage; Exercises; MODELING ELASTIC STRUCTURES; Introduction; Examples of Elastic Structures in MEMS/NEMS; The Mass on a Spring; Membranes; Beams; Plates; The Capacitive Pressure Sensor; Exercises; MODELING COUPLED THERMAL-ELASTIC SYSTEMS; Introduction; Devices and Phenomena in Thermal-Elastic Systems; Modeling Thermopneumatic Systems; The Thermoelastic Rod Revisited; Modeling Thermoelastic V-Beam Actuators; Modeling Thermal Bimorph Actuators; Modeling Bimetallic Thermal Actuators; Exercises; MODELING ELECTROSTATIC-ELASTIC SYSTEMS; Introduction; Devices Using Electrostatic Actuation; The Mass-Spring Model; Modeling General Electrostatic-Elastic Systems; Electrostatic-Elastic Systems --
Membrane Theory; Electrostatic-Elastic Systems --
Beam and Plate Theory; Analysis of Capacitive Control Schemes; Exercises; MODELING MAGNETICALLY ACTUATED SYSTEMS; Introduction; Magnetically Driven Devices; Mass-Spring Models; A Simple Membrane Micropump Model; A Small-Aspect Ratio Model; Exercises; MICROFLUIDICS; Introduction; Microfluidic Devices; More Fluidic Scaling; Modeling Squeeze Film Damping; Exercises; BEYOND CONTINUUM THEORY; Introduction; Limits of Contiuum Mechanics; Devices and Systems Beyond Continuum Theory; Exercises; REFERENCES; APPENDICES; Mathematical Results; Physical Constants; INDEX; ; Each chapter also contains Related Reading and Notes sections.
Responsibility: John A. Pelesko and David H. Bernstein.

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"Researchers in MEMS and NEMS are likely to find much of interest [in this book], and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent. Read more...

 
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