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MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, USA

Author: M Edward Motamedi; Rolf Göring; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Publisher: Bellingham, Wash., USA : SPIE, ©2001.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 4561.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
MOEMS and miniaturized systems II.
Bellingham, Wash., USA : SPIE, ©2001
(DLC) 2002277677
(OCoLC)48519272
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: M Edward Motamedi; Rolf Göring; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
ISBN: 0819442895 9780819442895
OCLC Number: 53836666
Description: 1 online resource (xxv, 350 pages) : illustrations.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4561.
Other Titles: SPIE digital library.
Responsibility: M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) [and others].

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Primary Entity

<http://www.worldcat.org/oclc/53836666> # MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, USA
    a schema:CreativeWork, schema:Book, schema:MediaObject ;
    library:oclcnum "53836666" ;
    library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/510567874#Place/bellingham_wash_usa> ; # Bellingham, Wash., USA
    library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
    rdfs:seeAlso <http://experiment.worldcat.org/entity/work/data/510567874#CreativeWork/spie_digital_library> ; # SPIE digital library.
    schema:about <http://dewey.info/class/621.381/e21/> ;
    schema:about <http://experiment.worldcat.org/entity/work/data/510567874#Topic/microelectromechanical_systems> ; # Microelectromechanical systems
    schema:about <http://id.worldcat.org/fast/1019745> ; # Microelectromechanical systems
    schema:about <http://experiment.worldcat.org/entity/work/data/510567874#Topic/micromechanics> ; # Micromechanics
    schema:about <http://experiment.worldcat.org/entity/work/data/510567874#Topic/optical_scanners> ; # Optical scanners
    schema:about <http://id.worldcat.org/fast/1022692> ; # Miniature electronic equipment
    schema:about <http://id.worldcat.org/fast/1046803> ; # Optical scanners
    schema:about <http://id.worldcat.org/fast/1019892> ; # Micromechanics
    schema:about <http://experiment.worldcat.org/entity/work/data/510567874#Topic/miniature_electronic_equipment> ; # Miniature electronic equipment
    schema:bookFormat schema:EBook ;
    schema:contributor <http://viaf.org/viaf/75637637> ; # Rolf Göring
    schema:contributor <http://viaf.org/viaf/22033285> ; # M Edward Motamedi
    schema:contributor <http://viaf.org/viaf/151856603> ; # Society of Photo-optical Instrumentation Engineers.
    schema:contributor <http://viaf.org/viaf/137722322> ; # Semiconductor Equipment and Materials International.
    schema:copyrightYear "2001" ;
    schema:datePublished "2001" ;
    schema:exampleOfWork <http://worldcat.org/entity/work/id/510567874> ;
    schema:genre "Conference papers and proceedings"@en ;
    schema:genre "Conference publication"@en ;
    schema:inLanguage "en" ;
    schema:isPartOf <http://experiment.worldcat.org/entity/work/data/510567874#Series/spie_proceedings_series> ; # SPIE proceedings series ;
    schema:isPartOf <http://experiment.worldcat.org/entity/work/data/510567874#Series/proceedings_of_spie_the_international_society_for_optical_engineering> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
    schema:isSimilarTo <http://www.worldcat.org/oclc/48519272> ;
    schema:name "MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, USA"@en ;
    schema:productID "53836666" ;
    schema:publication <http://www.worldcat.org/title/-/oclc/53836666#PublicationEvent/bellingham_wash_usa_spie_2001> ;
    schema:publisher <http://experiment.worldcat.org/entity/work/data/510567874#Agent/spie> ; # SPIE
    schema:url <http://link.spie.org/PSISDG/4561/1> ;
    schema:url <http://proceedings.spiedigitallibrary.org/volume.aspx?volume=4561> ;
    schema:workExample <http://worldcat.org/isbn/9780819442895> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/53836666> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/510567874#CreativeWork/spie_digital_library> # SPIE digital library.
    a schema:CreativeWork ;
    schema:name "SPIE digital library." ;
    .

<http://experiment.worldcat.org/entity/work/data/510567874#Place/bellingham_wash_usa> # Bellingham, Wash., USA
    a schema:Place ;
    schema:name "Bellingham, Wash., USA" ;
    .

<http://experiment.worldcat.org/entity/work/data/510567874#Series/proceedings_of_spie_the_international_society_for_optical_engineering> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
    schema:hasPart <http://www.worldcat.org/oclc/53836666> ; # MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, USA
    schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/510567874#Series/spie_proceedings_series> # SPIE proceedings series ;
    a bgn:PublicationSeries ;
    schema:hasPart <http://www.worldcat.org/oclc/53836666> ; # MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, USA
    schema:name "SPIE proceedings series ;" ;
    .

<http://id.worldcat.org/fast/1019745> # Microelectromechanical systems
    a schema:Intangible ;
    schema:name "Microelectromechanical systems"@en ;
    .

<http://id.worldcat.org/fast/1019892> # Micromechanics
    a schema:Intangible ;
    schema:name "Micromechanics"@en ;
    .

<http://id.worldcat.org/fast/1022692> # Miniature electronic equipment
    a schema:Intangible ;
    schema:name "Miniature electronic equipment"@en ;
    .

<http://id.worldcat.org/fast/1046803> # Optical scanners
    a schema:Intangible ;
    schema:name "Optical scanners"@en ;
    .

<http://link.spie.org/PSISDG/4561/1>
    rdfs:comment "SPIE Digital Library" ;
    .

<http://viaf.org/viaf/137722322> # Semiconductor Equipment and Materials International.
    a schema:Organization ;
    schema:name "Semiconductor Equipment and Materials International." ;
    .

<http://viaf.org/viaf/151856603> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
    schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://viaf.org/viaf/22033285> # M Edward Motamedi
    a schema:Person ;
    schema:familyName "Motamedi" ;
    schema:givenName "M. Edward" ;
    schema:name "M Edward Motamedi" ;
    .

<http://viaf.org/viaf/75637637> # Rolf Göring
    a schema:Person ;
    schema:familyName "Göring" ;
    schema:givenName "Rolf" ;
    schema:name "Rolf Göring" ;
    .

<http://worldcat.org/isbn/9780819442895>
    a schema:ProductModel ;
    schema:isbn "0819442895" ;
    schema:isbn "9780819442895" ;
    .

<http://www.worldcat.org/oclc/48519272>
    a schema:CreativeWork ;
    rdfs:label "MOEMS and miniaturized systems II." ;
    schema:description "Print version:" ;
    schema:isSimilarTo <http://www.worldcat.org/oclc/53836666> ; # MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, USA
    .

<http://www.worldcat.org/title/-/oclc/53836666>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
    schema:about <http://www.worldcat.org/oclc/53836666> ; # MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, USA
    schema:dateModified "2018-08-18" ;
    void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


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