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MOEMS and miniaturized systems IV : 27-28 January, 2004, San Jose, California, USA

Author: Ayman El-Fatatry; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash. : SPIE, ©2004.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 5346.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.

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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
MOEMS and miniaturized systems IV.
Bellingham, Wash. : SPIE, ©2004
(OCoLC)54670368
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Ayman El-Fatatry; Society of Photo-optical Instrumentation Engineers.
ISBN: 0819452548 9780819452542
OCLC Number: 54760257
Description: 1 online resource (xv, 230 pages) : illustrations.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 5346.
Other Titles: MOEMS and miniaturized systems 4
MOEMS and miniaturized systems four
SPIE digital library.
Responsibility: Ayman El-Fatatry, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering.

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