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MOEMS : micro-opto-electro-mechanical systems

Author: M Edward Motamedi
Publisher: Bellingham, WA : SPIE Press, ©2005.
Series: SPIE monograph, PM126.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Introduces the exciting and fast-moving field of MOEMS to students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct research in the  Read more...

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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: M Edward Motamedi
ISBN: 0819450219 9780819450210
OCLC Number: 56799174
Description: xxi, 614 pages : illustrations ; 26 cm.
Series Title: SPIE monograph, PM126.
Responsibility: Manouchehr E. Motamedi, editor.
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Primary Entity

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   schema:about <http://experiment.worldcat.org/entity/work/data/18363680#Topic/mikroelektronik> ; # Mikroelektronik
   schema:about <http://dewey.info/class/621.381/e22/> ;
   schema:about <http://id.worldcat.org/fast/1046908> ; # Optoelectronic devices
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   schema:about <http://experiment.worldcat.org/entity/work/data/18363680#Topic/optoelektronisches_bauelement> ; # Optoelektronisches Bauelement
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