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MOEMS : micro-opto-electro-mechanical systems

Author: M Edward Motamedi; Society of Photo-optical Instrumentation Engineers,
Publisher: Bellingham, Washington : SPIE Press, 2005. ©2005
Series: SPIE monograph, PM126.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version
(DLC) 2004024395
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: M Edward Motamedi; Society of Photo-optical Instrumentation Engineers,
ISBN: 9781510607873 1510607870
OCLC Number: 985343096
Notes: "SPIE Digital Library."--Website.
Description: 1 online resource (xxi, 614 pages) : illustrations.
Contents: Foreword / S. D. Senturia --
Preface / M. E. Motamedi --
Acknowledgments --
Chapter 1. Introduction / Manouchehr E. Motamedi --
Chapter 2. Microfabrication / Olga B. Spahn, S. Mani --
Chapter 3. Micro-optics / H. P. Herzig, E.-B. Kley, M. Cumme, L. C. Wittig --
Chapter 4. Actuation and sensing / Long Que, Yogesh B. Gianchandani --
Chapter 5. Micro-optic components, testing, and applications / Manouchehr E. Motamedi and Johannes Schwider --
Chapter 6. Fiber optic systems / Rolf Göring --
Chapter 7. Optical scanners / Tarik Bourouina, Hiroyuki Fujita, M., Gilbert Reyne, and M. Edward Motamedi --
Chapter 8. Display and imaging systems / Hakan Urey, David L. Dickensheets --
Chapter 9. Adaptive optics / Scot S. Olivier --
Chapter 10. MOEMS/MEMS CAD and simulation / Ridha Hamza, Jean Michel Karam, Philippe Nachtergaele --
Chapter 11. MEMS and MOEMS packaging / Ajay P. Malshe, John Patrick O'Connor --
Chapter 12. MOEMS and MEMS materials / William D. Cowan --
Problems and exercises --
Acronyms --
Index.
Series Title: SPIE monograph, PM126.
Responsibility: Manouchehr E. Motamedi, editor.
More information:

Abstract:

Introduces the exciting and fast-moving field of MOEMS to students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct research in the  Read more...

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