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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Divyesh N Patel; Mart Graef; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Electrochemical Society.
ISBN: 081942546X 9780819425461
OCLC Number: 37743176
Description: vii, 132 pages : illustrations ; 28 cm.
Contents: Interconnect metals and barriers --
CMP of metals and oxides --
Low-k dielectrics.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 3214.
Responsibility: Divyseh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society.

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