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Nano- and microelectromechanical systems : fundamentals of nano- and microengineering

Author: Sergey Edward Lyshevski
Publisher: Boca Raton : CRC Press, ©2001.
Series: Nano- and microscience, engineering, technology, and medicine series.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:

Nanoengineering and technology will change the very nature of most human-made structures, devices, and systems. This text develops the basic theoretical foundations needed to design, develop,  Read more...

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Additional Physical Format: Print version:
Lyshevski, Sergey Edward.
Nano- and microelectromechanical systems.
Boca Raton : CRC Press, ©2001
(DLC) 00057953
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Sergey Edward Lyshevski
ISBN: 0849309166 9780849309168
OCLC Number: 47080527
Description: 1 online resource (338 pages) : illustrations.
Contents: 1. Nano- and microengineering, and nano- and microtechnologies --
2. Mathematical models and design of nano- and microelectromechanical systems --
3. Structural design, modeling, and simulation --
4. Control of nano- and microelectromechanical systems.
Series Title: Nano- and microscience, engineering, technology, and medicine series.
Responsibility: Sergey Edward Lyshevski.

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