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Nanofabrication using focused ion and electron beams : principles and applications

Author: Ivo Utke; Stanislav Moshkalev; Phillip Russell
Publisher: Oxford ; New York : Oxford University Press, 2012.
Series: Oxford series on nanomanufacturing.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the  Read more...

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Document Type: Book
All Authors / Contributors: Ivo Utke; Stanislav Moshkalev; Phillip Russell
ISBN: 9780199734214 0199734216
OCLC Number: 707267321
Description: xvi, 813 pages : illustrations ; 27 cm.
Contents: Introduction ; I-1. Historical development of electron beam induced deposition and etching: from carbon to functional materials ; I. Utke, H. Koops ; I-2. Historical evolution of FIB technology: from circuit editing to nanoprototyping ; Ph. Russell. ; Part I. Fundamentals and Models ; 1. The theory of bright field electron and field ion emission sources ; R.Forbes ; 2. How to select compounds for focused charged particle beam assisted etching and deposition ; Tristan Bret, Patrik Hoffmann ; 3. Gas Injection Systems for FEB and FIB Processing: Theory and Experiment ; Vinzenz Friedli, Heinz D. Wanzenboeck, and Ivo Utke ; 4. Fundamentals of interactions of electrons with molecules ; John H. Moore, Petra Swiderek, Stefan Matejcik, Michael Allan ; 5. Simulation of focused ion beam milling ; Heung-Bae Kim, Gerhard Hobler ; 6. FEB and FIB continuum models for one molecule species ; Ivo Utke ; 7. Continuum modeling of electron beam induced processes ; Charlene J. Lobo and Milos Toth ; 8. Monte Carlo method in EBID process Beam
Series Title: Oxford series on nanomanufacturing.
Responsibility: edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

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The first part of the book includes eight chapters and occupies roughly one-third of the book, whilst the second part incorporates about 20 chapters and takes up about two-thirds of the book. Such a Read more...

 
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