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Nanotechnology : integrated processing systems for ultra-precision and ultra-fine products

Author: Norio Taniguchi
Publisher: Oxford [England] ; New York : Oxford University Press, 1996.
Series: Oxford science publications.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the  Read more...

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Additional Physical Format: Online version:
Nanotechnology.
Oxford [England] ; New York : Oxford University Press, 1996
(OCoLC)593222381
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Norio Taniguchi
ISBN: 0198562837 9780198562832
OCLC Number: 32893838
Description: xiv, 406 pages : illustrations ; 26 cm.
Contents: PART 1: FUNDAMENTALS OF NANOTECHNOLOGY ; PART 2: APPLICATIONS OF NANOTECHNOLOGY ; PART 3: FUTURE TRENDS IN NANOTECHNOLOGY
Series Title: Oxford science publications.
Responsibility: edited by Norio Taniguchi.
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