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New approaches to image processing based failure analysis of nano-scale ULSI devices

Author: Zeev Zalevsky; Pavel Livshits; Eran Gur
Publisher: Amsterdam : Elsevier/William Andrew, [2014] ©2014
Series: Micro & nano technologies.
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
Summary:
New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale  Read more...
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Document Type: Book
All Authors / Contributors: Zeev Zalevsky; Pavel Livshits; Eran Gur
ISBN: 9780323241434 0323241433
OCLC Number: 875166733
Description: 101 pages : illustrations ; 23 cm.
Contents: 1. Preface2. Introduction2.1 Basics of Image Processing2.2 The Problems of Shrinking Feature Size in ULSI Development and Failure Analysis2.3 High Resolution Imaging of Metallic Structures2.4 High Resolution Imaging of Non-Metallic Structures2.5 Fabrication techniques in ULSI industry3. New Image Processing Methods for Advanced Metallization in Micro- and Nano-Electronics3.1 Characteristics of Metal Ultra-Thin Films Microstructures3.2 Methods Based on Sample and Imaging System Knowledge3.3 Methods Based on Microstructure Grain Size and Shape Range Knowledge3.4 Increased Productivity by Obviating Steps of Selection of Measurement Conditions3.5 Demonstration of Method Capabilities3.5.1 Demonstration on Blurred HRSEM Images of Copper and Silver Films Microstructures3.5.2 Demonstration on Indistinct Images of Filled Trenches and Vias4. New Super Resolving Techniques and Methods for Micro-Electronics4.1 The basics of super resolution4.1.1 Introduction4.1.2 Super resolving hardware4.1.3 Super resolving numerics4.2 Numerical Approaches for super resolved imaging4.2.1 High-Resolution Layout Image Transform4.2.2 Low Resolution Image Transform (Experiment-based)4.2.3 Results of the Comparison4.3 Radon based super resolved imaging4.4 Numerical approaches for characterization of ULSI circuits4.5 Applications in Failure Analysis4.6 Applications in Manufacturing and Testing
Series Title: Micro & nano technologies.
Responsibility: Zeev Zalevsky, Pavel Livshits, Eran Gur.
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Abstract:

Introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. This book presents novel "smart" image processing methods, applications, and  Read more...

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