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Optical diagnostics for thin film processing

Author: Irving P Herman
Publisher: San Diego, CA : Academic Press, ©1996.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing.  Read more...

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Additional Physical Format: Online version:
Herman, Irving P.
Optical diagnostics for thin film processing.
San Diego, CA : Academic Press, ©1996
(OCoLC)645738582
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Irving P Herman
ISBN: 0123420709 9780123420701
OCLC Number: 32508558
Description: xxix, 783 pages : illustrations ; 24 cm
Contents: 1. Overview of Optical Diagnostics --
2. The Properties of Light --
3. The Structure of Matter --
4. Interactions of Light with Matter for Spectroscopy --
5. Diagnostics Equipment and Methods --
6. Optical Emission Spectroscopy --
7. Laser-Induced Fluorescence --
8. Transmission (Absorption) --
9. Reflection --
10. Interferometry and Photography --
11. Elastic Scattering and Diffraction from Particles and Nonplanar Surfaces (Scatterometry) --
12. Raman Scattering --
13. Pyrometry --
14. Photoluminescence --
15. Spectroscopies Employing Laser Heating --
16. Nonlinear Optical Diagnostics --
17. Optical Electron/Ion Probes --
18. Optical Thermometry --
19. Data Analysis and Process Control.
Responsibility: Irving P. Herman.
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"The greatest value of Optical Diagnostics for Thin Film Processing is a comprehensive reference text. I highly recommend it to anyone who wants to seriously delve into the field of thin film optical Read more...

 
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