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Optical inspection and metrology for non-optics industries : 3-4 August 2009, San Diego, California, United States

Author: Peisen S Huang; Tōru Yoshizawa; Kevin G Harding; SPIE (Society)
Publisher: Bellingham, Wash. : SPIE, ©2009.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 7432.
Edition/Format:   eBook : Document : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
Optical inspection and metrology for non-optics industries.
Bellingham, Wash. : SPIE, ©2009
(OCoLC)462813855
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Peisen S Huang; Tōru Yoshizawa; Kevin G Harding; SPIE (Society)
OCLC Number: 463002523
Description: 1 online resource (various pagings) : illustrations (some color).
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 7432.
Responsibility: Peisen S. Huang, Toru Yoshizawa, Kevin G. Harding, editors ; sponsored and published by SPIE.

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