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Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France

Author: Michel J LacombatSteven WittekoekEuropean Physical Society.European Federation for Applied Optics.Society of Photo-optical Instrumentation Engineers.All authors
Publisher: Bellingham, Wash., USA : SPIE, ©1989.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 1138.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
Optical microlithography and metrology for microcircuit fabrication.
Bellingham, Wash., USA : SPIE, ©1989
(DLC) 89062616
(OCoLC)21136665
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Michel J Lacombat; Steven Wittekoek; European Physical Society.; European Federation for Applied Optics.; Society of Photo-optical Instrumentation Engineers.; Association nationale de la recherche technique.
OCLC Number: 645284673
Reproduction Notes: Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
Description: 1 online resource (vii, 206 pages) : illustrations.
Details: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 1138.
Responsibility: Michel J. Lacombat, Steve Wittekoek, chairs/editors, the Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering ; cooperating organizations, ANRT Association nationale de la recherche technique [and others].

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Primary Entity

<http://www.worldcat.org/oclc/645284673> # Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France
    a schema:MediaObject, schema:Book, schema:CreativeWork ;
   library:oclcnum "645284673" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/22649650#Place/bellingham_wash_usa> ; # Bellingham, Wash., USA
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/22649650#Topic/conferences> ; # CONFERENCES
   schema:about <http://experiment.worldcat.org/entity/work/data/22649650#Topic/circuits> ; # CIRCUITS
   schema:about <http://experiment.worldcat.org/entity/work/data/22649650#Topic/design> ; # DESIGN
   schema:about <http://experiment.worldcat.org/entity/work/data/22649650#Topic/microlithography> ; # Microlithography
   schema:about <http://experiment.worldcat.org/entity/work/data/22649650#Topic/integrated_circuits_design_and_construction> ; # Integrated circuits--Design and construction
   schema:about <http://experiment.worldcat.org/entity/work/data/22649650#Topic/microelectronics> ; # MICROELECTRONICS
   schema:about <http://id.worldcat.org/fast/975545> ; # Integrated circuits--Design and construction
   schema:about <http://experiment.worldcat.org/entity/work/data/22649650#Topic/optics> ; # OPTICS
   schema:about <http://id.worldcat.org/fast/1019883> ; # Microlithography
   schema:about <http://experiment.worldcat.org/entity/work/data/22649650#Topic/integrated_circuits> ; # INTEGRATED CIRCUITS
   schema:about <http://experiment.worldcat.org/entity/work/data/22649650#Topic/lithography> ; # LITHOGRAPHY
   schema:bookFormat schema:EBook ;
   schema:contributor <http://experiment.worldcat.org/entity/work/data/22649650#Organization/society_of_photo_optical_instrumentation_engineers> ; # Society of Photo-optical Instrumentation Engineers.
   schema:contributor <http://experiment.worldcat.org/entity/work/data/22649650#Organization/association_nationale_de_la_recherche_technique> ; # Association nationale de la recherche technique.
   schema:contributor <http://viaf.org/viaf/61102394> ; # Michel J. Lacombat
   schema:contributor <http://viaf.org/viaf/279571406> ; # Steven Wittekoek
   schema:contributor <http://experiment.worldcat.org/entity/work/data/22649650#Organization/european_physical_society> ; # European Physical Society.
   schema:contributor <http://experiment.worldcat.org/entity/work/data/22649650#Meeting/eco2_1989_paris_france> ; # ECO2 (1989 : Paris, France)
   schema:contributor <http://viaf.org/viaf/150827271> ; # European Federation for Applied Optics.
   schema:copyrightYear "1989" ;
   schema:datePublished "1989" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/22649650> ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:genre "Conference publication"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://worldcat.org/issn/0277-786X> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/22649650#Series/spie_proceedings_series> ; # SPIE proceedings series ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/21136665> ;
   schema:name "Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France"@en ;
   schema:productID "645284673" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/645284673#PublicationEvent/bellingham_wash_usa_spie_1989> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/22649650#Agent/spie> ; # SPIE
   schema:url <http://link.spie.org/PSISDG/1138/1> ;
   schema:url <http://books.google.com/books?id=9n9WAAAAMAAJ> ;
   schema:url <http://catalog.hathitrust.org/api/volumes/oclc/21136665.html> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/645284673> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/22649650#Organization/association_nationale_de_la_recherche_technique> # Association nationale de la recherche technique.
    a schema:Organization ;
   schema:name "Association nationale de la recherche technique." ;
    .

<http://experiment.worldcat.org/entity/work/data/22649650#Organization/european_physical_society> # European Physical Society.
    a schema:Organization ;
   schema:name "European Physical Society." ;
    .

<http://experiment.worldcat.org/entity/work/data/22649650#Organization/society_of_photo_optical_instrumentation_engineers> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
   schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://experiment.worldcat.org/entity/work/data/22649650#Place/bellingham_wash_usa> # Bellingham, Wash., USA
    a schema:Place ;
   schema:name "Bellingham, Wash., USA" ;
    .

<http://experiment.worldcat.org/entity/work/data/22649650#Series/spie_proceedings_series> # SPIE proceedings series ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/645284673> ; # Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France
   schema:name "SPIE proceedings series ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/22649650#Topic/integrated_circuits> # INTEGRATED CIRCUITS
    a schema:Intangible ;
   schema:name "INTEGRATED CIRCUITS"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/22649650#Topic/integrated_circuits_design_and_construction> # Integrated circuits--Design and construction
    a schema:Intangible ;
   rdfs:seeAlso <http://id.loc.gov/authorities/subjects/sh2008104738> ;
   schema:name "Integrated circuits--Design and construction"@en ;
    .

<http://id.worldcat.org/fast/1019883> # Microlithography
    a schema:Intangible ;
   schema:name "Microlithography"@en ;
    .

<http://id.worldcat.org/fast/975545> # Integrated circuits--Design and construction
    a schema:Intangible ;
   schema:name "Integrated circuits--Design and construction"@en ;
    .

<http://viaf.org/viaf/150827271> # European Federation for Applied Optics.
    a schema:Organization ;
   schema:name "European Federation for Applied Optics." ;
    .

<http://viaf.org/viaf/279571406> # Steven Wittekoek
    a schema:Person ;
   schema:familyName "Wittekoek" ;
   schema:givenName "Steven" ;
   schema:name "Steven Wittekoek" ;
    .

<http://viaf.org/viaf/61102394> # Michel J. Lacombat
    a schema:Person ;
   schema:familyName "Lacombat" ;
   schema:givenName "Michel J." ;
   schema:name "Michel J. Lacombat" ;
    .

<http://worldcat.org/issn/0277-786X> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/645284673> ; # Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France
   schema:issn "0277-786X" ;
   schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://www.worldcat.org/oclc/21136665>
    a schema:CreativeWork ;
   rdfs:label "Optical microlithography and metrology for microcircuit fabrication." ;
   schema:description "Print version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/645284673> ; # Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France
    .

<http://www.worldcat.org/title/-/oclc/645284673>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
   schema:about <http://www.worldcat.org/oclc/645284673> ; # Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France
   schema:dateModified "2017-01-19" ;
   void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


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