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Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France

Author: Michel J LacombatSteven WittekoekEuropean Physical Society.European Federation for Applied Optics.Society of Photo-optical Instrumentation Engineers.All authors
Publisher: Bellingham, Wash., USA : SPIE, ©1989.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 1138.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
Optical microlithography and metrology for microcircuit fabrication.
Bellingham, Wash., USA : SPIE, ©1989
(DLC) 89062616
(OCoLC)21136665
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Michel J Lacombat; Steven Wittekoek; European Physical Society.; European Federation for Applied Optics.; Society of Photo-optical Instrumentation Engineers.; Association nationale de la recherche technique.
OCLC Number: 645284673
Reproduction Notes: Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
Description: 1 online resource (vii, 206 pages) : illustrations.
Details: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 1138.
Responsibility: Michel J. Lacombat, Steve Wittekoek, chairs/editors, the Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering ; cooperating organizations, ANRT Association nationale de la recherche technique [and others].

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