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Optical microlithography V : 13-14 March 1986, Santa Clara, California

Author: Harry L Stover; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1986.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 633.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Optical microlithography V.
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1986
(OCoLC)721002610
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Harry L Stover; Society of Photo-optical Instrumentation Engineers.
ISBN: 0892526688 9780892526680
OCLC Number: 14218008
Description: vi, 309 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 633.
Other Titles: Optical microlithography 5.
Optical microlithography five
Responsibility: Harry L. Stover, chairman/editor.

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