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Organometallic Vapor-Phase Epitaxy : Theory and Practice.

Author: Gerald B Stringfellow
Publisher: Burlington : Elsevier Science, 1989.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Stringfellow, Gerald B.
Organometallic Vapor-Phase Epitaxy : Theory and Practice.
Burlington : Elsevier Science, ©1989
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Gerald B Stringfellow
ISBN: 9780323139175 0323139175
OCLC Number: 843202338
Description: 1 online resource (417 pages)

Abstract:

Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and the.

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