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The physics of microfabrication

Author: Ivor Brodie; Julius J Muray
Publisher: New York : Plenum Press, ©1982.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:

The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20  Read more...

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Genre/Form: Electronic books
Additional Physical Format: Print version:
Brodie, Ivor.
Physics of microfabrication.
New York : Plenum Press, ©1982
(DLC) 82003835
(OCoLC)8282885
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Ivor Brodie; Julius J Muray
ISBN: 9781489921604 1489921605
OCLC Number: 644194581
Reproduction Notes: Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
Description: 1 online resource (xix, 503 pages) : illustrations
Details: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Contents: 1 Preliminary Survey.- 2 Particle Beams: Sources, Optics, and Interactions.- 3 Thin Films.- 4 Pattern Generation.- 5 Special Processes Developed for Microcircuit Technology.- 6 Submicron Microscopy and Microprobes.- 7 Future Directions.- Appendices.- A. The Error Function and Some of Its Properties.- B. Properties of Silicon.- C. Useful Physical Constants in Microscience.- References.
Responsibility: Ivor Brodie and Julius J. Muray.

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