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The physics of microfabrication

Author: Ivor Brodie; Julius J Muray
Publisher: New York : Plenum Press, ©1982.
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
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Additional Physical Format: Online version:
Brodie, Ivor.
Physics of microfabrication.
New York : Plenum Press, ©1982
(OCoLC)644194581
Document Type: Book
All Authors / Contributors: Ivor Brodie; Julius J Muray
ISBN: 0306408635 9780306408632
OCLC Number: 8282885
Description: xix, 503 pages : illustrations ; 24 cm
Contents: 1 Preliminary Survey.- 2 Particle Beams: Sources, Optics, and Interactions.- 3 Thin Films.- 4 Pattern Generation.- 5 Special Processes Developed for Microcircuit Technology.- 6 Submicron Microscopy and Microprobes.- 7 Future Directions.- Appendices.- A. The Error Function and Some of Its Properties.- B. Properties of Silicon.- C. Useful Physical Constants in Microscience.- References.
Responsibility: Ivor Brodie and Julius J. Muray.
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