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Plasma processing of materials : scientific opportunities and technological challenges

Author: National Research Council (U.S.). Panel on Plasma Processing of Materials.
Publisher: Washington, D.C. : National Academy Press, 1991.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Describes the relationship between plasma processes and industrial applications, examines plasma processing in the electronics industry, highlights the scientific foundation underlying this  Read more...

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Additional Physical Format: Online version:
National Research Council (U.S.). Panel on Plasma Processing of Materials.
Plasma processing of materials.
Washington, D.C. : National Academy Press, 1991
(OCoLC)645824130
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: National Research Council (U.S.). Panel on Plasma Processing of Materials.
ISBN: 0309045975 9780309045971
OCLC Number: 24832731
Description: xii, 75 pages : illustrations ; 28 cm
Contents: 1 FRONT MATTER; 2 1 SUMMARY, FINDINGS, CONCLUSIONS, AND RECOMMENDATIONS; 3 2 PLASMA PROCESSING AND LOW-ENERGY PLASMA SCIENCE; 4 3 PLASMA PROCESSING IN THE ELECTRONICS INDUSTRY; 5 4 SCIENTIFIC FOUNDATION OF PLASMA PROCESSING; 6 5 EDUCATIONAL ISSUES; 7 APPENDIX: PARTICIPANTS IN WORKSHOP ON PLASMA PROCESSING OF MATERIALS
Responsibility: Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

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