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Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

Author: J W Coburn; R A Gottscho; Dennis W Hess; Materials Research Society.
Publisher: Pittsburgh, Pa. : Materials Research Society, ©1986.
Series: Materials Research Society symposia proceedings, v. 68.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Plasma processing.
Pittsburgh, Pa. : Materials Research Society, ©1986
(OCoLC)567953067
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: J W Coburn; R A Gottscho; Dennis W Hess; Materials Research Society.
ISBN: 0931837340 9780931837340
OCLC Number: 13795753
Description: xvii, 463 pages : illustrations ; 24 cm.
Series Title: Materials Research Society symposia proceedings, v. 68.
Responsibility: editors, J.W. Coburn, R.A. Gottscho, D.W. Hess.

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