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Practical surface analysis / 2, Ion and neutral spectroscopy.

Publisher: Chichester : Wiley, 1992.
Edition/Format:   Print book : English : 2. edView all editions and formats
Summary:

This volume reflects the rapid evolution of surface analysis techniques involving ion and neural spectroscopies. Sputtering techniques are comprehensively discussed in chapters covering  Read more...

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Document Type: Book
ISBN: 3793555488 9783793555483 0471920827 9780471920823 0471964980 9780471964988
OCLC Number: 311468836
Description: XVI, 738 S. : ill., graph. Darst
Contents: A perspective on the analysis of surfaces and interfaces; instrumentation for SIMS; basic aspects of sputter depth profiling; quantitative analysis using sputtering techniques - secondary ion and sputtered neutral mass spectrometry; dynamic SIMS and its applications in microelectronics; static SIMS - surface analysis of organic materials; sputtered neutral mass spectrometry (SNMS); ion scattering spectroscopic techniques; medium energy ion scattering.
Responsibility: ed. by D. Briggs ...

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